Browsing by Subject "Capacitive micromachined ultrasonic transducers"

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Open Access
Batch-compatible micromanufacturing of a CMUT array for optoacoustic imaging of tissue-like phantoms
(2021-08) Özyiğit, Doğu Kaan Buğra
Photoacoustic imaging (PAI), also named optoacoustic imaging, is a technol-ogy for medical imaging that relies on contrast data due to optical stimulation. Capacitive micromachined ultrasound transducers (CMUTs) are previously in-troduced for PAI applications. In this thesis, the provided CMUT array design has been partially micro-manufactured separately from electronics and a laser ﬁber light source while re-serving the necessary chip space for integration with electronics and laser ﬁber light source. Batch compatible wafer-scale microfabrication of CMUT arrays was done by a combination of novel as well as traditional MEMS microfabrication pro-cesses. CMUT array gaps, bottom electrodes, and insulation layer were formed on the Pyrex wafer using three separate photolithography masks. Anodic wafer bonding method is used for the formation of the top electrodes and top side of the gap heights of CMUT arrays. Process development for anodic wafer bonding between Pyrex wafers and SOI wafers has been done, where the Pyrex wafers have been previously processed with plasma etching, wet etching, metal stack de-position, insulation layer deposition, and insulation layer patterning, while SOI wafers have been used as received. Pyrex wafers and SOI wafers were anodically bonded to each other with developed anodic wafer bonding processes. After full completion of the micromanufacturing of the CMUT array chips, these CMUT ar-ray chips will be integrated with ASIC chips. Then, CMUT array chips and ASIC chips will be combined with a traditional printed circuit board (PCB). These in-tegrated CMUT array chips, ASIC chips, and PCB are going to be integrated with a ﬁber laser light source inside a mechanically robust hand-held probe that is planned to be used for optoacoustic imaging. The main goal of this CMUT array micromanufacturing study is to signiﬁcantly contribute to the development of one of the necessary components for imaging of a tissue like-phantom using a hand-held imaging probe.
Open Access
Design charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducers
(IEEE, 2005) Ölçüm, Selim; Şenlik, Muhammed Niyazi; Bayram, Can; Atalar, Abdullah
In this work we define a performance measure for capacitive micromachined ultrasonic transducers (cMUT) in the form of a gain-bandwidth product to investigate the conditions that optimize the gain and bandwidth with respect to device dimensions, electrode size and electrical termination resistance. For the transmit mode, we define the figure of merit as the pressure-bandwidth product. Fully-metallized membranes achieve a higher pressure-bandwidth product compared to partially metallized ones. It is shown that the bandwidth is not affected by the electrode size in the transmit mode. In the receive mode, we define the figure of merit as the gain-bandwidth product. We show in this case that the figure of merit can be maximized by optimizing the electrode radius. We present normalized charts for designing an optimum cMUT cell at the desired frequency with a given bandwidth for transmit or receive modes. The effect of spurious capacitance and liquid loading effect are considered. Design examples are given to clarify the use of these charts.
Open Access
Design, fabrication and operation of a very high intensity CMUT transmit array for beam steering applications
(2020-12) Khan, Talha Masood
Several studies have reported airborne ultrasound transmission systems focused on achieving beamforming. However, beam steering and beamforming for capacitive micromachined ultrasonic transducers (CMUTs) at high intensity remains to be accomplished. CMUTs, like other ultrasonic transducers, incorporate a loss mechanism to obtain a wide bandwidth. They are restricted to a limited amount of plate swing due to the gap between the radiating plate and the bottom electrode, along with a high dc bias operation. CMUTs can be designed to produce high-intensity ultrasound by employing an unbiased operation. This mode of operation allows the plate to swing the entire gap without collapsing, thus enabling higher intensity. In this study, we use an equivalent circuit-based model to design unbiased CMUT arrays driven at half the mechanical frequency. This model is cross verified using finite element analysis (FEA). CMUT arrays are produced in multiple configurations using a customized microfabrication process that involves anodic wafer bonding, a single lithographic mask, and a shadow mask. We use impedance measurements to characterize the microfabricated devices. We experimentally obtained the highest reported intensity using a microfabricated 2×2 CMUT array driven at resonance in a pulsed configuration. This array is also capable of beam steering and beamforming at a high intensity such that it can steer the entire half-space. The beam obtained from the array is in excellent agreement with the theoretical predictions. The amplitude and phase compensation for the devices remain constant that makes these arrays attractive for applications involving park assist, gesture recognition, and tactile displays.
Open Access
Electrically unbiased and half frequency driven waterborne 16×16-element 2-D phased array CMUT
(2019-08) Enhoş, Kerem
Capacitive micromachined ultrasonic transducers (CMUT) are typically used as arrays consisting of separate cells or interconnected sub arrays, and these cells have several operation modes. Design procedure and measurements have been previously presented for an airborne CMUT cell without a DC bias. In unbiased mode, the plate motion spans the entire gap without collapsing. The frequency of sinusoidal electrical input signal is half of the resulting acoustical output signal. A large plate swing can be obtained at low excitation voltages using the entire remaining gap. In this work, a design procedure of arrays with unbiased operation mode is derived. Designs are validated by means of simulations and measurements on fabricated CMUTs. The problems associated with beamforming are resolved. Use of this operation mode in an array configuration enables larger acoustical power output. A better transmitted signal waveform definition is obtained when pulse width modulation (PWM) is employed. In the design process of CMUTs, large-signal equivalent circuit model is used. In order to have volumetric transmission, a 16×16 (256 elements) phased array configuration is chosen. A design procedure is presented considering the radiation pattern, Rayleigh distance and the parameters of the lumped-element model. This procedure is applied for designing two arrays, with resonance frequencies at 7.5 MHz and at 18.5 MHz. Harmonic balance and transient analyses are carried out with Gaussian enveloped tone burst, transient sinusoidal and PWM signals with different duty cycles. Outputs of these simulations are fed in beamforming toolboxes for further verification. Corresponding experimental measurements are conducted on an ultrasound measurement system. The dimensions of the CMUT elements in the array are determined as 80 μm element radius, 15 μm plate thickness, and 171 nm effective gap height at 7.5 MHz, where the center-to-center inter-element pitch is set at 192 μm. The array is designed such that it has maximum Rayleigh distance of 45.3 mm, while having a maximum sidelobe level of −17.4 dB. According to these specifications, CMUT array is manufactured using wafer scale batch compatible production. Only two lithography masks, which require conventional photolithography steps, are used in production. The vibrating plate is constructed with anodic wafer bonding and the fabricated CMUT array chip is integrated to PCB with flip-chip bonding. Measurements are conducted for this novel device by integrating the CMUT array chip manufactured with MEMS techniques and conventional macro scale manufactured PCB by using impedance analyser.
Open Access
Experimental characterization of capacitive micromachined ultrasonic transducers
(IEEE, 2007) Ölçüm, Selim; Atalar, Abdullah; Köymen, Hayrettin; Oğuz, Kağan; Şenlik, Muhammed N.
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Open Access
Improved performance of cMUT with nonuniform membranes
(IEEE, 2005-09) Şenlik, Muhammed N.; Olcum, Selim; Atalar, Abdullah
When capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can be transferred. We present a membrane shape to shift the second resonance frequency to a higher value. The structure consists of a very thin membrane at the outer rim with a rigid mass at the center. The stiffness of the central region moves the second resonance to a higher frequency. This membrane configuration is shown to work better in terms of gain and bandwidth as compared to conventional uniform membranes in both transmission and reception. © 2005 IEEE.
Open Access
A new detection method for capacitive micromachine ultrasonic transducers
(IEEE, 2001) Ergun, A. S.; Temelkuran, B.; Özbay, Ekmel; Atalar, Abdullah
Capacitive micromachine ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They consist of many small circular membranes that are connected in parallel. In this work, we report a new detection method for cMUTs. We model the membranes as capacitors and the interconnections between the membranes as inductors. This kind of LC network is called an artificial transmission line. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the frequency of the signal through it. By measuring the electrical length of the artificial line at a high RF frequency (in the gigahertz range), the vibrations of the membranes can be detected in a very sensitive manner. For the devices we measured, we calculated the minimum detectable displacement to be in the order of 10 -5 Å/√Hz with a possible improvement to 10 -7 Å/√Hz.
Open Access
A new signal detection method for capacitive micromachined ultrasonic transducers
(1999) Ergun, Arif Sanlı
Capacitive micromachined ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They are constructed by integrating many small circular membranes in parallel. In this thesis, we demonstrate a new signal detection method for cMUT’s. We model the membranes as capacitors, and the interconnection lines between the membranes as inductors. The resulting circuit is an artificial transmission line with a certain electrical length. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the frequency of the signal through it. By measuring the electrical length of the artificial transmission line using a high RF frequency (in the GHz range), the vibrations of the membranes can be detected in a very sensitive manner. Typically, the improvement over the conventional method is two orders of magnitude. For the devices we measured we observed a minimum detectable displacement in the order of 10"^ A/V^.
Embargo
Process development for microfabrication of phase reversal CMUT devices for structural health monitoring and development of dynamic characterization processes for MEMS applications
(2024-08) Küçük, Merve Mintaş
If appropriately designed, Capacitive Micromachined Ultrasonic Transducers (CMUTs) offer advantageous properties such as low cost, small size, low impedance, and environmental friendliness, over piezoelectric transducers. These advantageous properties of CMUTs enable the CMUT devices to be employed in a large area of applications, such as medical applications and non-destructive testing (NDT) applications. CMUT devices and technologies that are heavily developed for medical applications also shed light on the development of CMUT devices to be used in Structural Health Monitoring (SHM) applications for civil infrastructures. Continuous monitoring of the signals produced by the sudden changes happening within civil infrastructures such as bridges or railways may give crucial information about the health of these structures. The rapid release of localized strain energy, which generates Acoustic Emission (AE) waves, is an important indicator of the state of the health of a structure. Detecting AE wave signals may give significant clues about damage formation such as impact, crack initiation, or crack growth. Because AE waves are scattered among a broad range of frequencies, sensing of such AE waves should also be done in broadband, and sensors are preferred to be highly sensitive among such band. For real-life applicable developments, it should be also considered that the environment of the real-life application may be very noisy due to many unrelated reasons, which makes employment of the CMUTs developed in a tightly controlled laboratory environment unpractical for the real-life applications. The noise may often be induced by the noise interferences that are produced by a variety of events that are not needed to be detected. To prevent misjudgments, it is important to differentiate between noise interferences and relevant AE signals, as the presence of significant noise can hinder the detectability of AE waves associated with structural damage. In this process development for CMUT prototype microfabrication study, we collaborated with a group of researchers who have introduced a new approach to designing broadband CMUTs, as well as a unique type of CMUT combination that uses phase-reversal (PR) of generated electrical current for detecting a wide range of mechanical vibration wave frequencies and reducing unwanted noise. By considering the simplest combination of two CMUT cells, the theoretical study, supported by FEM simulations, demonstrated that reversing the electrical current phase of one cell can create low-frequency and high-frequency stopbands for noise rejection, which is applicable for CMUTs operating in air damping. The primary objective of this thesis study is to develop microfabrication processes to microfabricate PR-CMUT devices to bridge the gap between theoretical design and real-world application of PR-CMUT devices. These PR-CMUT arrays that are designed for wafer-scale batch-compatible manufacturability have a flat passband in the 200-250 kHz and 200-300 kHz frequency ranges and two improved stopbands on both sides of the relevant frequency ranges. The photolithography masks, compatible material selections, and microfabrication process flows (integration processes) required for the microfabrication of these PR-CMUT devices were designed considering the capabilities of our cleanroom facility. Microfabrication of the devices was tried multiple times, and in line with the problems encountered in these processes, the microfabrication process flows were updated and the PR-CMUT devices were tried to be produced in multiple iterations. Unit processes, and multiple integration processes were developed and completed. Possible solutions to be implemented in the future microfabrication studies were determined. Additionally, dynamic characterization of individual circular geometry CMUT membranes were explored using a ZYGO Optical Profilometer. With this measurement tool (ZYGO), it is possible to measure CMUT device membrane displacements precisely when the membrane of the CMUT device is moving (vibrating) dynamically. Results obtained from ZYGO Optical Profilometer tool were compared with the impedance analyzer results. It was shown that the resonance frequency of a circular membrane CMUT device can be observed with the ZYGO Optical Profilometer. Furthermore, based on the conclusions from the studies in this thesis, future studies are suggested for further development towards realization and characterization of these PR-CMUT MEMS (MicroElectroMechanical System) devices.
Open Access
Wafer bonded capacitive micromachined underwater transducers
(IEEE, 2009-09) Olcum, Selim; Oǧuz, Kaan; Şenlik, Muhammed N.; Yamaner F. Y.; Bozkurt, A.; Atalar, Abdullah; Köymen, Hayrettin
In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT element. The active area of the transducer is fabricated on top of a 3″ silicon wafer. The silicon wafer is bonded to a gold electrode coated glass substrate wafer 10 cm in diameter. Thermally grown silicon oxide layer is used as the insulation layer between membrane and substrate electrodes. Electrical contacts and insulation are made by epoxy layers. Single CMUT elements are tested in air and in water. Approximately 40% bandwidth is achieved around 25 KHz with a single underwater CMUT cell. Radiated pressure field due to second harmonic generation when the CMUTs are driven with high sinusoidal voltages is measured. ©2009 IEEE.