Experimental characterization of capacitive micromachined ultrasonic transducers
Date
2007
Advisor
Instructor
Source Title
Proceedings of the Ultrasonics Symposium, IEEE 2007
Print ISSN
1051-0117
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
2131 - 2134
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Course
Other identifiers
Book Title
Keywords
Capacitive micromachined ultrasonic transducers, cMUT, Electroacoustic transducers, Experiments, Flow of fluids, Micromachining, Optical design, Transducers, Ultrasonic equipment, Ultrasonic measurement, Ultrasonic waves, Ultrasonics, Experimental characterization, Fabricated devices, Pitch-catch, Pulse echoes, Surface micromachining processes, Testing procedures, Ultrasonic transducers