Experimental characterization of capacitive micromachined ultrasonic transducers
Date
2007
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Source Title
Proceedings of the Ultrasonics Symposium, IEEE 2007
Print ISSN
1051-0117
Electronic ISSN
Publisher
IEEE
Volume
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Pages
2131 - 2134
Language
English
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Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
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Keywords
Capacitive micromachined ultrasonic transducers , cMUT , Electroacoustic transducers , Experiments , Flow of fluids , Micromachining , Optical design , Transducers , Ultrasonic equipment , Ultrasonic measurement , Ultrasonic waves , Ultrasonics , Experimental characterization , Fabricated devices , Pitch-catch , Pulse echoes , Surface micromachining processes , Testing procedures , Ultrasonic transducers