Design charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducers

Abstract

In this work we define a performance measure for capacitive micromachined ultrasonic transducers (cMUT) in the form of a gain-bandwidth product to investigate the conditions that optimize the gain and bandwidth with respect to device dimensions, electrode size and electrical termination resistance. For the transmit mode, we define the figure of merit as the pressure-bandwidth product. Fully-metallized membranes achieve a higher pressure-bandwidth product compared to partially metallized ones. It is shown that the bandwidth is not affected by the electrode size in the transmit mode. In the receive mode, we define the figure of merit as the gain-bandwidth product. We show in this case that the figure of merit can be maximized by optimizing the electrode radius. We present normalized charts for designing an optimum cMUT cell at the desired frequency with a given bandwidth for transmit or receive modes. The effect of spurious capacitance and liquid loading effect are considered. Design examples are given to clarify the use of these charts.