A new detection method for capacitive micromachine ultrasonic transducers

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New detection method for capacitive micromachined ultrasonic transducers.pdf (1.36 MB)

Date

2001

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Source Title

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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IEEE

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Keywords

Capacitive micromachined ultrasonic transducers, Electrical length, Ultrasound frequency, Capacitance, Capacitors, Demodulation, Electric inductors, Electric variables measurement, Electrodes, Mathematical models, Signal detection, Ultrasonics, Vibrations (mechanical), Ultrasonic transducers

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http://hdl.handle.net/11693/24843

Published Version (Please cite this version)

http://dx.doi.org/10.1109/58.935710

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Scholarly Publications - Physics
Scholarly Publications - Electrical and Electronics Engineering

Language

English

Type

Article

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