On-chip liquid and gas flow rate sensing via membrane deformation and bistability probed by microwave resonators

buir.contributor.orcidTefek, Uzay|0000-0001-6639-0783en_US
buir.contributor.orcidHanay, M. Selim|0000-0002-1928-044Xen_US
dc.citation.epage15en_US
dc.citation.spage1en_US
dc.contributor.authorSeçme, Arda
dc.contributor.authorPisheh, Hadi Sedaghat
dc.contributor.authorUslu, H. Dilara
dc.contributor.authorTefek, Uzay
dc.contributor.authorKüçükoğlu, Berk
dc.contributor.authorAlataş, Ceren
dc.contributor.authorKelleci, Mehmet
dc.contributor.authorHanay, M. Selim
dc.contributor.bilkentauthorSeçme, Arda
dc.contributor.bilkentauthorPisheh, Hadi Sedaghat
dc.contributor.bilkentauthorUslu, H. Dilara
dc.contributor.bilkentauthorTefek, Uzay
dc.contributor.bilkentauthorKüçükoğlu, Berk
dc.contributor.bilkentauthorAlataş, Ceren
dc.contributor.bilkentauthorKelleci, Mehmet
dc.contributor.bilkentauthorHanay, M. Selim
dc.date.accessioned2023-03-22T06:32:47Z
dc.date.available2023-03-22T06:32:47Z
dc.date.issued2022-11-15
dc.departmentDepartment of Mechanical Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractAbstract Precise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Fluid flow induces deformations on the membrane, which is electronically probed by the changes in the capacitance and resonance frequency of an overlapping microwave resonator. By tracking the resonance frequency, both liquid and gas flows were probed with the same device architecture. For liquid flow experiments, a secondary sensing mechanism emerged when it was observed that steady liquid flow induces periodic deformations on the membrane. Here, the period of membrane deformation depends on the flow rate and can again be measured electronically by the microwave sensor. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid-structure interactions at micro and nanoscales.en_US
dc.identifier.doi10.21203/rs.3.rs-2260428/v1en_US
dc.identifier.eissn1613-4990
dc.identifier.issn1613-4982
dc.identifier.urihttp://hdl.handle.net/11693/112299
dc.language.isoEnglishen_US
dc.publisherSpringeren_US
dc.relationinfo:eu-repo/grantAgreement/EC/H2020/758769/
dc.relation.isversionofhttps://doi.org/10.21203/rs.3.rs-2260428/v1en_US
dc.relation.projectResonant Electromagnetic Microscopy: Imaging Cells Electronically
dc.rightsinfo:eu-repo/semantics/openAccess
dc.source.titleMicrofluidics and Nanofluidicsen_US
dc.subjectFlow rate sensingen_US
dc.subjectMicrowave sensorsen_US
dc.subjectMicrofluidicsen_US
dc.subjectMembranesen_US
dc.titleOn-chip liquid and gas flow rate sensing via membrane deformation and bistability probed by microwave resonatorsen_US
dc.typeArticleen_US
Files
Original bundle
Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
On_chip_liquid_and_gas_flow_rate_sensing_via_membrane_deformation_and_bistability_probed_by_microwave_resonators.pdf
Size:
631.97 KB
Format:
Adobe Portable Document Format
Description:
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.69 KB
Format:
Item-specific license agreed upon to submission
Description: