Microheater-integrated spectrally selective multiband mid-infrared nanoemitter for on-chip optical multigas sensing

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buir.contributor.authorRahimian Omam, Zahra
buir.contributor.authorGhobadi, Amir
buir.contributor.authorKhalichi, Bahram
buir.contributor.authorGüneş, Burak
buir.contributor.authorÖzbay, Ekmel
buir.contributor.orcidRahimian Omam, Zahra|0000-0003-2699-6881
buir.contributor.orcidGhobadi, Amir|0000-0002-8146-0361
buir.contributor.orcidKhalichi, Bahram|0000-0002-9465-1044
buir.contributor.orcidGüneş, Burak|0000-0002-8710-4202
buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.citation.epage20600en_US
dc.citation.issueNumber22
dc.citation.spage20588
dc.citation.volumeNumber6
dc.contributor.authorRahimian Omam, Zahra
dc.contributor.authorGhobadi, Amir
dc.contributor.authorKhalichi, Bahram
dc.contributor.authorGüneş, Burak
dc.contributor.authorÖzbay, Ekmel
dc.date.accessioned2024-03-15T13:47:23Z
dc.date.available2024-03-15T13:47:23Z
dc.date.issued2023-11-10
dc.departmentNanotechnology Research Center (NANOTAM)
dc.departmentDepartment of Electrical and Electronics Engineering
dc.departmentDepartment of Physics
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)
dc.description.abstractTraditional optical gas sensors often require multiple components such as broadband infrared sources, detectors, and band-pass filters to detect various target gases, resulting in bulky and expensive sensor designs. A streamlined optical gas-sensing platform utilizing a narrowband thermal emitter with a spectrally selective response, capable of accommodating various target gases, has the potential to supplant current bulky designs. Through the on-chip integration of a narrowband metamaterial perfect absorber with a microelectromechanical system (MEMS) heater, a selective infrared source emitter could be designed. In this paper, a multiband metamaterial absorber with resonance modes located at different gas absorption signatures is developed for optical multi-gas-sensing applications. The proposed nanoemitter supports penta-band light absorption through the simultaneous excitation of phononic modes (within the hexagonal boron nitride (hBN) topmost layer) and plasmonic modes (with the spectrally selective underlying metal-insulator-metal (MIM) absorber stack). It achieves five near-perfect sharp absorption resonance peaks compatible with the H2S, CH4, CO2, NO, and SO2 gas absorption signatures in the mid-infrared (MIR) spectral range. This spectrally engineered multiwavelength absorption behavior is achieved by simultaneously coupling the optical phonons (OPhs) and the plasmonic modes in the vicinity of the OPh region of hBN and by exciting plasmonic modes with the help of the spacer (ZnTe: zinc telluride) and the metallic nanogratings. Finally, this low-cost and efficient penta-band absorber is combined with a MEMS-based microheater. The microheater uses a Peano-shaped configuration to provide a highly uniform surface temperature, which is crucial for accurate and reliable gas sensing. The proposed platform demonstrates excellent potential in terms of cost-effectiveness, source-free operation, and suitability for multi-gas-sensing platforms.
dc.embargo.release2024-11-10
dc.identifier.doi10.1021/acsanm.3c02988
dc.identifier.eissn2574-0970
dc.identifier.urihttps://hdl.handle.net/11693/114819
dc.language.isoen
dc.publisherAmerican Chemical Society
dc.relation.isversionofhttps://dx.doi.org/10.1021/acsanm.3c02988
dc.rightsCC BY-NC-ND 4.0 Deed (Attribution-NonCommercial-NoDerivs 4.0 International)
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/4.0/
dc.source.titleACS Applied Nano Material
dc.subjectGas sensor
dc.subjectHexagonal boron nitride
dc.subjectMEMS-based microheater
dc.subjectMetasurfaces
dc.subjectOptical phonons
dc.subjectPhonon polariton
dc.subjectPlasmons
dc.titleMicroheater-integrated spectrally selective multiband mid-infrared nanoemitter for on-chip optical multigas sensing
dc.typeArticle

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Nanotechnology Research Center (NANOTAM)
Department of Electrical and Electronics Engineering
Department of Physics
Institute of Materials Science and Nanotechnology (UNAM)