Modeling and analysis of a MEMS vibrating ring gyroscope subject to imperfections

Abstract

We present a new mathematical model for a vibrating ring gyroscope (VRG) in the presence of imperfections, namely, structural defects and material anisotropy. As a novelty, we calculate the mode shapes of the internal suspension structure to enable a more accurate and modular analysis of the VRG’s mass and stiffness distributions. Solving the associated eigenvalue problem shows that imperfections result in the frequency split between the gyroscope’s operating mode shapes, rotating their orientation with respect to the nominal drive and sense axes. We then use perturbation analysis to solve the VRG’s equations of motion and analyze the quadrature error that arises from frequency/damping mismatch between the mode shapes. We use our model to detail the various effects of the etching-related undercuts, structural uncertainties, and Young’s modulus anisotropy–in the form of suitable space-dependent functions–on the mode shapes and the quadrature error for the first time. The results reveal that rings are robust against imperfection, while the straight beams used in the suspension system are most likely responsible for the frequency split and quadrature error. For example, 50 nm (0.5%) width variation in a beam that connects the VRG’s suspension to an anchored internal structure leads to 4700°/s quadrature error. To validate our modeling, using the experimental data from a fabricated 59 kHz VRG, we provide rigorous, comparative simulations against the finite element method (FEM).