Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition
buir.contributor.author | Bıyıklı, Necmi | |
buir.contributor.orcid | Uyar, Tamer|0000-0002-3989-4481 | |
dc.citation.epage | 138 | en_US |
dc.citation.spage | 133 | en_US |
dc.citation.volumeNumber | 1408 | en_US |
dc.contributor.author | Ozgit-Akgun, Çagla | en_US |
dc.contributor.author | Kayacı, Fatma | en_US |
dc.contributor.author | Dönmez, İnci | en_US |
dc.contributor.author | Çağatay, Engin | en_US |
dc.contributor.author | Uyar, Tamer | en_US |
dc.contributor.author | Bıyıklı, Necmi | en_US |
dc.coverage.spatial | Boston, Massachusetts, USA | en_US |
dc.date.accessioned | 2016-02-08T12:13:02Z | |
dc.date.available | 2016-02-08T12:13:02Z | |
dc.date.issued | 2012 | en_US |
dc.department | Institute of Materials Science and Nanotechnology (UNAM) | en_US |
dc.description | Conference name: Materials Research Society Symposium (MRS) Proceedings, 2011 Materials Research Society (MRS) Fall Meeting & Exhibit, | en_US |
dc.description | Date of Conference: November 28-December 2, 2011 | en_US |
dc.description.abstract | Al 2O 3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum (TMAl), water (H 2O), and ammonia (NH 3) as the aluminum, oxygen, and nitrogen precursors, respectively. Deposition rates of Al 2O 3 and AlN at this temperature were ∼1.05 and 0.86 Å/cycle. After the depositions, Al 2O 3- and AlN-coated nanofibers were calcinated at 500°C for 2 h in order to remove organic components. Nanotubes were characterized by using X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). AlN nanotubes were polycrystalline as determined by high resolution TEM (HR-TEM) and selected area electron diffraction (SAED). TEM images of all the samples reported in this study indicated uniform wall thicknesses. © 2012 Materials Research Society. | en_US |
dc.identifier.doi | 10.1557/opl.2012.38 | en_US |
dc.identifier.issn | 0272-9172 | |
dc.identifier.uri | http://hdl.handle.net/11693/28169 | |
dc.language.iso | English | en_US |
dc.publisher | Cambridge University Press | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1557/opl.2012.38 | en_US |
dc.source.title | Materials Research Society Symposium Proceedings | en_US |
dc.subject | AlN | en_US |
dc.subject | Electrospuns | en_US |
dc.subject | High-resolution TEM | en_US |
dc.subject | Nylon 66 | en_US |
dc.subject | Organic components | en_US |
dc.subject | Polycrystalline | en_US |
dc.subject | Selected area electron diffraction | en_US |
dc.subject | TEM images | en_US |
dc.subject | Transmission electron microscopy tem | en_US |
dc.subject | Trimethylaluminum | en_US |
dc.subject | Wall thickness | en_US |
dc.subject | Aluminum | en_US |
dc.subject | Aluminum nitride | en_US |
dc.subject | Atomic layer deposition | en_US |
dc.subject | Deposition | en_US |
dc.subject | Electron diffraction | en_US |
dc.subject | Nanofibers | en_US |
dc.subject | Nanowires | en_US |
dc.subject | Photoelectrons | en_US |
dc.subject | Scanning electron microscopy | en_US |
dc.subject | Transmission electron microscopy | en_US |
dc.subject | X ray photoelectron spectroscopy | en_US |
dc.subject | Nanotubes | en_US |
dc.title | Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition | en_US |
dc.type | Conference Paper | en_US |
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