Design, fabrication and characterization of high-performance solarblind AlGaN photodetectors
Date
2005
Authors
Advisor
Instructor
Source Title
Proceedings of SPIE
Print ISSN
0277-786X
Electronic ISSN
Publisher
SPIE
Volume
6013
Issue
Pages
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
Design, fabrication, and characterization of high-performance AlxGal-xN-based photodetectors for solar-blind applications are reported. AlxGal-xN heterostructures were designed for Schottky, p-i-n, and metal-semiconductor-metal (MSM) photodiodes. The resulting solar-blind AlGaN detectors exhibited low dark current, high detectivity, and high bandwidth.
Course
Other identifiers
Book Title
Keywords
AlGaN, Detectivity, Heterostructure, High-speed, MSM, p-i-n, Photodetector, Schottky, Solar-blind, UV, Bandwidth, Design, Fabrication, Heterojunctions, Schottky barrier diodes, Semiconductor metal boundaries, Ultraviolet detectors, AlGaN, Detectivity, High-speed, Metal-semiconductor-metal, Solar-blind, Photodetectors