Investigation of thin films SiO2 obtained by low temperature plasmachemical deposition
Date
1994-07-26
Authors
Timofeev, F. N.
Bozkurt, K.
Gure, M.
Aydınlı, Atilla
Süzer, Şefik
Ellialtioglu, R.
Turkoglu, K.
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Source Title
Soviet Technical Physics Letters
= Письма в Журнал Tехнической Физики
Publisher
American Institute of Physics
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Language
Russian