Flexible strain sensors based on electrostatically actuated graphene flakes

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buir.contributor.authorDemir, Hilmi Volkan
buir.contributor.orcidDemir, Hilmi Volkan|0000-0003-1793-112X
dc.citation.epage7en_US
dc.citation.issueNumber7en_US
dc.citation.spage1en_US
dc.citation.volumeNumber25en_US
dc.contributor.authorFardindoost, S.en_US
dc.contributor.authorAlipour, A.en_US
dc.contributor.authorMohammadi, S.en_US
dc.contributor.authorGökyar, S.en_US
dc.contributor.authorSarvari, R.en_US
dc.contributor.authorIraji Zad, A.en_US
dc.contributor.authorDemir, Hilmi Volkanen_US
dc.date.accessioned2016-02-08T09:48:10Z
dc.date.available2016-02-08T09:48:10Z
dc.date.issued2015en_US
dc.departmentDepartment of Physicsen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractIn this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 μm, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of ∼60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations. © 2015 IOP Publishing Ltd.en_US
dc.identifier.doi10.1088/0960-1317/25/7/075016en_US
dc.identifier.issn0960-1317
dc.identifier.urihttp://hdl.handle.net/11693/21569
dc.language.isoEnglishen_US
dc.publisherInstitute of Physics Publishingen_US
dc.relation.isversionofhttp://dx.doi.org/10.1088/0960-1317/25/7/075016en_US
dc.source.titleJournal of Micromechanics and Microengineeringen_US
dc.subjectGraphene electromechanical resonatoren_US
dc.subjectElectromechanical devicesen_US
dc.subjectElectrostatic actuatorsen_US
dc.subjectNatural frequenciesen_US
dc.subjectResonanceen_US
dc.subjectElectrical actuationen_US
dc.subjectElectromechanical resonatorsen_US
dc.subjectFlexible sensoren_US
dc.subjectMechanical resonance frequencyen_US
dc.subjectNon - planar surfacesen_US
dc.subjectPhysical dimensionsen_US
dc.subjectResonance frequenciesen_US
dc.subjectStrain sensingen_US
dc.subjectGrapheneen_US
dc.titleFlexible strain sensors based on electrostatically actuated graphene flakesen_US
dc.typeArticleen_US

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