Flexible strain sensors based on electrostatically actuated graphene flakes

Date
2015
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Source Title
Journal of Micromechanics and Microengineering
Print ISSN
0960-1317
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Publisher
Institute of Physics Publishing
Volume
25
Issue
7
Pages
1 - 7
Language
English
Type
Article
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Abstract

In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 μm, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of ∼60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations. © 2015 IOP Publishing Ltd.

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Keywords
Graphene electromechanical resonator, Electromechanical devices, Electrostatic actuators, Natural frequencies, Resonance, Electrical actuation, Electromechanical resonators, Flexible sensor, Mechanical resonance frequency, Non - planar surfaces, Physical dimensions, Resonance frequencies, Strain sensing, Graphene
Citation
Published Version (Please cite this version)