Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications

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buir.contributor.authorBıyıklı, Necmi
dc.citation.epage164en_US
dc.citation.spage161en_US
dc.citation.volumeNumber2en_US
dc.contributor.authorÇağatay, Enginen_US
dc.contributor.authorNoyan, Mehmet Alicanen_US
dc.contributor.authorDamgaci, Y.en_US
dc.contributor.authorCetiner, B. A.en_US
dc.contributor.authorBıyıklı, Necmien_US
dc.coverage.spatialSanta Clara, CAen_US
dc.date.accessioned2016-02-08T12:13:17Z
dc.date.available2016-02-08T12:13:17Z
dc.date.issued2012en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionDate of Conference: 18-21 June 2012en_US
dc.descriptionConference name: Microtech Conference & Expo 2012en_US
dc.description.abstractWe demonstrate that room-temperature liquid metal alloy droplets of Eutectic Gallium Indium (EGaIn) and Gallium Indium Tin alloy (Galinstan) can be actuated using electro-wetting-on-dielectric (EWOD) effect. With the application of 80-100V across the actuation electrode and ground electrode, the metallic liquid droplets were observed to be actuated. We have studied the actuation characteristics using different electrode architectures in open-air configuration as well as in encapsulated microfluidic channel test-beds. The resulting microfluidic DC actuation might potentially be used for RF switching applications.en_US
dc.identifier.urihttp://hdl.handle.net/11693/28175
dc.language.isoEnglishen_US
dc.publisherCRC Pressen_US
dc.source.titleNanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computationalen_US
dc.subjectDroplet microfluidicsen_US
dc.subjectEWODen_US
dc.subjectLiquid-metalen_US
dc.subjectMicro-fabricationen_US
dc.subjectSwitchen_US
dc.subjectDroplet microfluidicsen_US
dc.subjectElectro-wetting on dielectricsen_US
dc.subjectElectrode architectureen_US
dc.subjectEWODen_US
dc.subjectMetallic liquiden_US
dc.subjectMicrofluidic channelen_US
dc.subjectRF applicationsen_US
dc.subjectRF switchingen_US
dc.subjectRoom temperatureen_US
dc.subjectDropsen_US
dc.subjectExhibitionsen_US
dc.subjectFabricationen_US
dc.subjectGalliumen_US
dc.subjectGallium alloysen_US
dc.subjectIndiumen_US
dc.subjectIndium alloysen_US
dc.subjectLiquid metalsen_US
dc.subjectMicrofluidicsen_US
dc.subjectSwitchesen_US
dc.subjectTinen_US
dc.subjectNanotechnologyen_US
dc.titleFabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applicationsen_US
dc.typeConference Paperen_US

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Institute of Materials Science and Nanotechnology (UNAM)