Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications
Date
2012
Advisor
Instructor
Source Title
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
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Electronic ISSN
Publisher
CRC Press
Volume
2
Issue
Pages
161 - 164
Language
English
Type
Conference Paper
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Volume Title
Abstract
We demonstrate that room-temperature liquid metal alloy droplets of Eutectic Gallium Indium (EGaIn) and Gallium Indium Tin alloy (Galinstan) can be actuated using electro-wetting-on-dielectric (EWOD) effect. With the application of 80-100V across the actuation electrode and ground electrode, the metallic liquid droplets were observed to be actuated. We have studied the actuation characteristics using different electrode architectures in open-air configuration as well as in encapsulated microfluidic channel test-beds. The resulting microfluidic DC actuation might potentially be used for RF switching applications.
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Keywords
Droplet microfluidics, EWOD, Liquid-metal, Micro-fabrication, Switch, Droplet microfluidics, Electro-wetting on dielectrics, Electrode architecture, EWOD, Metallic liquid, Microfluidic channel, RF applications, RF switching, Room temperature, Drops, Exhibitions, Fabrication, Gallium, Gallium alloys, Indium, Indium alloys, Liquid metals, Microfluidics, Switches, Tin, Nanotechnology