Optimization of piezoresistive motion detection for ambient NEMS applications

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buir.contributor.authorHanay, Mehmet Selim
dc.citation.volumeNumber2020-Octoberen_US
dc.contributor.authorTi, C.
dc.contributor.authorArı, A.
dc.contributor.authorOrhan, E.
dc.contributor.authorGonzalez, M.
dc.contributor.authorYanık, C.
dc.contributor.authorKaya, İ. İ.
dc.contributor.authorHanay, Mehmet Selim
dc.contributor.authorEkinci, K. L.
dc.coverage.spatialRotterdam, Netherlandsen_US
dc.date.accessioned2021-03-03T11:26:28Z
dc.date.available2021-03-03T11:26:28Z
dc.date.issued2020
dc.departmentDepartment of Mechanical Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionDate of Conference: 25-28 October 2020en_US
dc.descriptionConference Name: 19th IEEE Conference on Sensors, SENSORS 2020en_US
dc.description.abstractElectrical readout of nanomechanical motion in ambient pressure and temperature imposes an important challenge for emerging applications of nanoelectromechanical systems (NEMS). Here, we optimize a metallic piezoresistive motion transducer for NEMS resonators in air. The nanomechanical motion of the NEMS resonator serves as a signal down-mixer and enables the detection of the motional signal by a low-frequency circuit. A balanced circuit in the detection loop reduces some of the unwanted background and allows for detection without significant losses. We explore the detection parameter space and use an optimized parameter set to detect the fundamental, second and third harmonic resonances of a NEMS doubly-clamped beam resonator. Our simple circuit model agrees with experimental observations and points the way for further optimization.en_US
dc.description.provenanceSubmitted by Zeynep Aykut (zeynepay@bilkent.edu.tr) on 2021-03-03T11:26:28Z No. of bitstreams: 1 Optimization_of_piezoresistive_motion_detection_for_ambient_NEMS_applications.pdf: 2925678 bytes, checksum: ee95703cc5c4f3b99d19d16022753318 (MD5)en
dc.description.provenanceMade available in DSpace on 2021-03-03T11:26:28Z (GMT). No. of bitstreams: 1 Optimization_of_piezoresistive_motion_detection_for_ambient_NEMS_applications.pdf: 2925678 bytes, checksum: ee95703cc5c4f3b99d19d16022753318 (MD5) Previous issue date: 2020en
dc.identifier.doi10.1109/SENSORS47125.2020.9278593en_US
dc.identifier.eisbn9781728168012
dc.identifier.eissn2168-9229
dc.identifier.isbn9781728168029
dc.identifier.issn1930-0395
dc.identifier.urihttp://hdl.handle.net/11693/75714
dc.language.isoEnglishen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttps://dx.doi.org/10.1109/SENSORS47125.2020.9278593en_US
dc.source.titleProceedings of IEEE Sensorsen_US
dc.subjectNEMSen_US
dc.subjectMetallic piezoresistanceen_US
dc.subjectSignal downmixingen_US
dc.subjectMotion transduceren_US
dc.subjectBackground reductionen_US
dc.titleOptimization of piezoresistive motion detection for ambient NEMS applicationsen_US
dc.typeConference Paperen_US

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