Modeling stress effects on frequencies of a MEMS ring gyroscope
Date
2023-03-01
Editor(s)
Advisor
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Print ISSN
1084-6999
Electronic ISSN
2160-1968
Publisher
IEEE
Volume
Issue
Pages
869 - 872
Language
en_US
Type
Journal Title
Journal ISSN
Volume Title
Series
Abstract
We present, for the first time, an analytical model for the external stress effects on the frequencies of a vibrating ring gyroscope (VRG). The stress-induced anchor displacements cause gap changes in the electrodes and nonhomogeneous boundary conditions in the VRG’s suspension structure. Stress stiffness arising from the geometric nonlinearity in the suspension is the principal mechanism affecting VRG’s frequencies as it dominates variations of the electrostatic softening. We validate our model using external stress tests performed on a 57kHz VRG equipped with 16 symmetrically distributed, on-chip capacitive stress sensors, which provide anchor displacement measurements.