Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor

Date

1996-01

Authors

Minne, S. C.
Manalis, S. R.
Atalar, Abdullah
Quate, C. F.

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Source Title

Applied Physics Letters

Print ISSN

0003-6951

Electronic ISSN

1077-3118

Publisher

A I P Publishing LLC

Volume

68

Issue

10

Pages

1427 - 1429

Language

English

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Abstract

Using an atomic force microscope (AFM) with a silicon cantilever partially covered with a layer of zinc oxide (ZnO), we have imaged in the constant force mode by employing the ZnO as both a sensor and actuator. The cantilever deflection is determined by driving the ZnO at the second mechanical resonance while the tip is in contact with the sample. As the tip‐sample force varies, the mechanical boundary condition of the oscillating cantilever is altered, and the ZnO electrical admittance is changed. Constant force is obtained by offsetting the ZnO drive so that the admittance remains constant. We have also used the ZnO as an actuator and sensor for imaging in the intermittent contact mode. In both modes, images produced by using the ZnO as a sensor are compared to images acquired with a piezoresistive sensor.

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Published Version (Please cite this version)