Micromachined two-dimensional array piezoelectrically actuated transducers
buir.contributor.orcid | Atalar, Abdullah|0000-0002-1903-1240 | |
dc.citation.epage | 1399 | en_US |
dc.citation.issueNumber | 11 | en_US |
dc.citation.spage | 1397 | en_US |
dc.citation.volumeNumber | 72 | en_US |
dc.contributor.author | Perçin, G. | en_US |
dc.contributor.author | Atalar, Abdullah | en_US |
dc.contributor.author | Degertekin, L. | en_US |
dc.contributor.author | Khuri-Yakub, B. T. | en_US |
dc.date.accessioned | 2015-07-28T11:56:29Z | |
dc.date.available | 2015-07-28T11:56:29Z | |
dc.date.issued | 1998-03-16 | en_US |
dc.department | Department of Electrical and Electronics Engineering | en_US |
dc.department | Institute of Materials Science and Nanotechnology (UNAM) | en_US |
dc.description.abstract | This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications. | en_US |
dc.description.provenance | Made available in DSpace on 2015-07-28T11:56:29Z (GMT). No. of bitstreams: 1 10.1063-1.121067.pdf: 1808012 bytes, checksum: f3a2a792b6d2ad62c700eff0c8d9c352 (MD5) | en |
dc.identifier.doi | 10.1063/1.121067 | en_US |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | http://hdl.handle.net/11693/10991 | |
dc.language.iso | English | en_US |
dc.publisher | A I P Publishing LLC | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1063/1.121067 | en_US |
dc.source.title | Applied Physics Letters | en_US |
dc.subject | Micromachined two-dimensional array | en_US |
dc.title | Micromachined two-dimensional array piezoelectrically actuated transducers | en_US |
dc.type | Article | en_US |
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