Micromachined two-dimensional array piezoelectrically actuated transducers

Date

1998-03-16

Authors

Perçin, G.
Atalar, Abdullah
Degertekin, L.
Khuri-Yakub, B. T.

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Abstract

This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.

Source Title

Applied Physics Letters

Publisher

A I P Publishing LLC

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Published Version (Please cite this version)

Language

English