On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

buir.contributor.orcidSeçme, Arda|0000-0003-1639-8642en_US
buir.contributor.orcidPisheh, Hadi Sedaghat|0000-0002-0407-3261en_US
buir.contributor.orcidTefek, Uzay|0000-0001-6639-0783en_US
buir.contributor.orcidUslu, H. Dilara|0000-0002-9643-0894en_US
buir.contributor.orcidKüçükoğlu, Berk|0000-0002-5544-4392en_US
buir.contributor.orcidKelleci, Mehmet|0000-0003-4522-1088en_US
buir.contributor.orcidHanay, Mehmet Selim|0000-0002-1928-044Xen_US
dc.citation.epage11en_US
dc.citation.issueNumber28en_US
dc.citation.spage1en_US
dc.citation.volumeNumber27en_US
dc.contributor.authorSeçme, Arda
dc.contributor.authorPisheh, Hadi Sedaghat
dc.contributor.authorTefek, Uzay
dc.contributor.authorUslu, H. Dilara
dc.contributor.authorKüçükoğlu, Berk
dc.contributor.authorAlataş, Ceren
dc.contributor.authorKelleci, Mehmet
dc.contributor.authorHanay, Mehmet Selim
dc.contributor.bilkentauthorSeçme, Arda
dc.contributor.bilkentauthorPisheh, Hadi Sedaghat
dc.contributor.bilkentauthorTefek, Uzay
dc.contributor.bilkentauthorUslu, H. Dilara
dc.contributor.bilkentauthorKüçükoğlu, Berk
dc.contributor.bilkentauthorAlataş, Ceren
dc.contributor.bilkentauthorKelleci, Mehmet
dc.contributor.bilkentauthorHanay, Mehmet Selim
dc.date.accessioned2023-04-10T19:57:08Z
dc.date.available2023-04-10T19:57:08Z
dc.date.issued8-04-2023
dc.departmentDepartment of Mechanical Engineeringen_US
dc.description.abstractPrecise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Applied pressure and fluid flow induce different modes of deformations on the membrane, which are electronically probed by an integrated microwave resonator. The flow changes the capacitance, and in turn resonance frequency, of the microwave resonator. By tracking the resonance frequency, liquid flow was probed with the device. In addition to responding to applied pressure by deflection, the membrane also exhibits periodic pulsation motion under fluid flow at a constant rate. The two separate mechanisms, deflection and pulsation, constitute sensing mechanisms for pressure and flow rate. Using the same device architecture, we also detected pressure-induced deformations by a gas to draw further insight into the sensing mechanism of the membrane. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid–structure interactions at micro- and nanoscales.en_US
dc.identifier.doi10.1007/s10404-023-02640-9en_US
dc.identifier.eissn1613-4990
dc.identifier.urihttp://hdl.handle.net/11693/112324
dc.language.isoEnglishen_US
dc.publisherSpringer Linken_US
dc.relation.isversionofhttps://doi.org/10.1007/s10404-023-02640-9en_US
dc.source.titleMicrofluidics and Nanofluidicsen_US
dc.subjectFlow rate sensingen_US
dc.subjectMicrowave sensorsen_US
dc.subjectMicrofuidicsen_US
dc.subjectMembranesen_US
dc.subjectFluid–structure interactionen_US
dc.subjectDeformable microfuidicsen_US
dc.subjectNonlinear microfuidicsen_US
dc.subjectNanomembrane fow sensingen_US
dc.titleOn-chip flow rate sensing via membrane deformation and bistability probed by microwave resonatorsen_US
dc.typeArticleen_US
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