Browsing by Subject "Microelectromechanical devices"
Now showing 1 - 5 of 5
Results Per Page
Sort Options
Item Open Access Low-voltage small-size double-arm MEMS actuator(2009) Bıyıklı, Necmi; Damgaci, Y.; Cetiner, B.A.The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using a microwave-compatible fabrication process. Owing to its small size, cantilever length (L=5-50m) and width (W=2-40m), i.e. ∼10-100 times smaller in lateral dimensions than a standard MEMS actuator, this actuator showed actuation voltages lower than 10 V. RF measurements of the 10m-wide actuators yielded an average insertion loss less than 1dB and isolation higher than 40dB up to 25GHz. The developed actuator is well suited for integration in reconfigurable microwave circuits and systems such as reconfigurable antennas and arrays. © 2009 The Institution of Engineering and Technology.Item Open Access Metamaterial-based wireless RF-MEMS strain sensors(IEEE, 2010) Melik, Rohat; Ünal, Emre; Perkgoz, Nihan Kosku; Puttlitz, C.; Demir, Hilmi VolkanApproximately 10% of the fractures do not heal properly because of the inability to monitor fracture healing. Standard radiography is not capable of discriminating whether bone healing is occurring normally or aberrantly. We propose and develop an implantable wireless sensor that monitors strain on implanted hardware in real time telemetrically. This enables clinicians to monitor fracture healing. Here we present the development and demonstration of metamaterial-based radiofrequency (RF) micro-electro-mechanical system (MEMS) strain sensors for wireless strain sensing to monitor fracture healing. The operating frequency of these sensors shifts under mechanical loading; this shift is related to the surface strain of the implantable test material. In this work, we implemented metamaterials in two different architectures as bio-implantable wireless strain sensors for the first time. These custom-design metamaterials exhibit better performance as sensors than traditional RF structures (e.g., spiral coils) because of their unique structural properties (splits). They feature a low enough operating frequency to avoid the background absorption of soft tissue and yield higher Q-factors compared to the spiral structures (because their gaps have much higher electric field density). In our first metamaterial architecture of an 5x5 array, the wireless sensor shows high sensitivity (109kHz/kgf, 5.148kHz/microstrain) with low nonlinearity-error (<200microstrain). Using our second architecture, we then improved the structure of classical metamaterial and obtained nested metamaterials that incorporate multiple metamaterials in a compact nested structure and measured strain telemetrically at low operating frequencies. This novel nested metamaterial structure outperformed classical metamaterial structure as wireless strain sensors. By employing nested metamaterial architecture, the operating frequency is reduced from 529.8 MHz to 506.2 MHz while the sensitivity is increased from 0.72 kHz/kgf to 1.09 kHz/kgf. ©2010 IEEE.Item Open Access Nanoelectromechanical switches for reconfigurable antennas(2010) Cetiner, B.A.; Bıyıklı, Necmi; Yildirim, B.S.; Damgaci, Y.We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 μm, width = 60 nm). The NEMS switch used in this work has the same architecture with low voltage, double-arm cantilever-type metallic DC-contact microelectromechanical system (MEMS) switch recently developed in author's group. The microfabrication and characterization of the MEMS switch have also been given in this article. Copyright © 2009 Wiley Periodicals, Inc.Item Open Access Nested metamaterials for wireless strain sensing(IEEE, 2009-12-28) Melik, R.; Unal, E.; Perkgoz, N. K.; Santoni, B.; Kamstock, D.; Puttlitz, C.; Demir, Hilmi VolkanWe designed, fabricated, and characterized metamaterial-based RF-microelectromechanical system (RF-MEMS) strain sensors that incorporate multiple split ring resonators (SRRs) in a compact nested architecture to measure strain telemetrically. We also showed biocompatibility of these strain sensors in an animal model. With these devices, our bioimplantable wireless metamaterial sensors are intended, to enable clinicians, to quantitatively evaluate the progression of long-bone fracture healing by monitoring the strain on the implantable fracture fixation hardware in real time. In operation, the transmission spectrum of the metamaterial sensor attached to the implantable fixture is changed when an external load is applied to the fixture, and from this change, the strain is recorded remotely. By employing telemetric characterizations, we reduced the operating frequency and enhanced the sensitivity of our novel nested SRR architecture compared to the conventional SRR structure. The nested SRR structure exhibited a higher sensitivity of 1.09 kHz/kgf operating at lower frequency compared to the classical SRR that demonstrated a sensitivity of 0.72 kHz/kgf. Using soft tissue medium, we achieved the best sensitivity level of 4.00 kHz/kgf with our nested SRR sensor. Ultimately, the laboratory characterization and in vivo biocompatibility studies support further development and characterization of a fracture healing system based on implantable nested SRR.Item Open Access Spiral microfluidics device for continuous flow PCR(ASME, 2013) Salemmilani, Reza; Çetin, BarbarosPolymerase-chain-Reaction (PCR) is a thermal cycling (repeated heating and cooling of PCR solution) process for DNA amplification. PCR is the key ingredient in many biomedical applications. One key feature for the success of the PCR is to control the temperature of the solution precisely at the desired temperature levels required for the PCR in a cyclic manner. Microfluidics offers a great advantage over conventional techniques since minute amounts of PCR solution can be heated and cooled with a high rate in a controlled manner. In this study, a microfluidic platform has been proposed for continuous-flow PCR. The microfluidic device consists of a spiral channel on a glass wafer with integrated chromium microheaters. Sub-micron thick microheaters are deposited beneath the micro-channels to facilitate localized heating. The microfluidic device is modeled using COMSOL MultiphysicsR . The fabrication procedure of the device is also discussed and future research directions are addressed. With its compact design, the proposed system can easily be coupled with an integrated microfluidic device to be used in biomedical applications. Copyright © 2013 by ASME.