Nanoelectromechanical switches for reconfigurable antennas
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2010
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Abstract
We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 μm, width = 60 nm). The NEMS switch used in this work has the same architecture with low voltage, double-arm cantilever-type metallic DC-contact microelectromechanical system (MEMS) switch recently developed in author's group. The microfabrication and characterization of the MEMS switch have also been given in this article. Copyright © 2009 Wiley Periodicals, Inc.
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Microwave and Optical Technology Letters
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Full-wave electromagnetic analysis, Microelectromechanical system (MEMS) switch, Multifunctional reconfigurable antenna, Nanoelectromechanical system (NEMS) switch, Electromagnetic analysis, Microelectromechanical system switches, Nano electromechanical systems, Reconfigurable antenna, Composite micromechanics, Mechatronics, MEMS, Microelectromechanical devices, NEMS, Antennas
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English