Browsing by Subject "Micro-bolometers"

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    Digitally alloyed ZnO and TiO2 thin film thermistors by atomic layer deposition for uncooled microbolometer applications
    (AVS Science and Technology Society, 2017) Tilkioğlu, Bilge T.; Bolat, Sami; Tanrıkulu, Mahmud Yusuf; Okyay, Ali Kemal
    The authors demonstrate the digital alloying of ZnO and TiO2 via atomic layer deposition method to be utilized as the active material of uncooled microbolometers. Depositions are carried out at 200 °C. Crystallinity of the material is shown to be degraded with the increase of the Ti content in the grown film. A maximum temperature coefficient of resistance (TCR) of −5.96%/K is obtained with the films containing 12.2 at. % Ti, and the obtained TCR value is shown to be temperature insensitive in the 15-22 °C, thereby allowing a wide range of operation temperatures for the low cost microbolometers. © 2017 American Vacuum Society.
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    LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
    (SPIE, 2017) Poyraz, M.; Gorgulu, K.; Sisman, Z.; Tanrikulu, M. Y.; Okyay, Ali Kemal
    We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).