LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Date
2017
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Source Title
Optical Engineering
Print ISSN
0091-3286
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Publisher
SPIE
Volume
56
Issue
3
Pages
037106-1 - 037106-5
Language
English
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Abstract

We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).

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