LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Series

Abstract

We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).

Source Title

Optical Engineering

Publisher

SPIE

Course

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Book Title

Keywords

Atomic layer deposition, Microbolometers, Uncooled infrared imaging, Zinc oxide, Atomic layer deposition, Atoms, Bolometers, Deposition, Infrared imaging, Temperature sensors, Thermography (imaging), Absorption co-efficient, Bi-layer structure, Long-wave infrared regimes, Micro-bolometers, Single-layer structure, Thermal simulations, Time constants, Infrared radiation

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Citation

Published Version (Please cite this version)

Language

English