Browsing by Subject "Lithography"

Now showing 1 - 18 of 18

Open Access
50 nm Hall Sensors for Room Temperature Scanning Hall Probe Microscopy
(Institute of Physics Publishing, 2004) Sandhu, A.; Kurosawa, K.; Dede, M.; Oral, A.
Bismuth nano-Hall sensors with dimensions ∼50nm × 50 nm were fabricated using a combination of optical lithography and focused ion beam milling. The Hall coefficient, series resistance and optimum magnetic field sensitivity of the sensors were 4 × 10-4 Ω/G, 9.1kΩ and 0.8G/√Hz, respectively. A 50nm nano-Bi Hall sensor was installed into a room temperature scanning Hall probe microscope and successfully used for directly imaging ferromagnetic domains of low coercivity garnet thin films.
Open Access
Color holographic reconstruction using multiple SLMs and LED illumination
(SPIE, 2009-01) Yaraş, Fahri; Onural, Levent
A color holographic reconstruction technique by using three light emitting diodes (LEDs) is described. Reflective type phase-only spatial light modulators (SLMs) are used since they are suitable for in-line phase holograms. Gerchberg-Saxton iterative algorithm is used for computing phase holograms. Three phase holograms are calculated separately for red, green and blue colors, for a color reconstruction, and separately loaded to corresponding SLMs. Three LEDs are used for illuminating those phase holograms and reconstructions are combined and captured. Experimental results are satisfactory. © 2009 SPIE-IS&T.
Open Access
Doppler effect on nanopatterning with nonlinear laser lithography
(OSA, 2017) Yavuz, Özgün; Kara, Semih; Tokel, Onur; Pavlov, Ihor; İlday, Fatih Ömer
Summary form only given. Just five years after invention of the laser, laser induced periodic structures (LIPSS) had been reported. However, the structure period is not very uniform in LIPSS. Recently, with nonlinear laser lithography (NLL), long range ordered periodic surface structures had been maintained by exploiting various feedback mechanisms and nonlinearities. Albeit, fine tuning of structure period remains challenging. Here, we present an analogy between Doppler effect and structure period of the NLL which adds a capability of changing the structure period.
Open Access
Fabrication of 100 nm pMOSFETS With Hybrid AFW / STM lithography
(IEEE, 1997-06) Soh, H. T.; Wilder, K.; Atalar, Abdullah; Quate, C. F.
Scanning probe lithography (SPL) is an emerging area of research in which the scanning tunneling microscope (STM) or atomic force microscope (AFM) is used to pattern nanometer-scale features. Four factors will dictate the viability of SPL as a patterning technology for the semiconductor industry: 1) resolution, 2) alignment accuracy, 3) reliability, and 4) throughput. We present a new SPL technique-a hybrid between the AFM and STMto address these issues. We demonstrate its capabilities and its compatibility with semiconductor processing by fabricating a pMOSFET with an effective channel length (L,ff) of 100 nm and report the device characteristics.
Open Access
Fabrication of polymer micro needles for transdermal drug delivery system using DLP based projection stereo-lithography
(Elsevier, 2016) Ali, Z.; Türeyen, E. Buğra; Karpat, Yiğit; Çakmakcı, Melih
Fabrication of micro needles, which reduce pain during insertion and lessen tissue injury, has recently attracted great interest. Different manufacturing systems have been utilized for the advancement of micro needles such as two-photon photo polymerization, bulk lithography, droplet-borne air blowing and injection molding [1]. This paper proposes a micro fabrication process for polymer micro needles, using DLP based projection-based stereo lithography that is capable of fabricating micro-needles using biocompatible polymers. The fabrication in the experimental setup is performed with continuous movement of the platform in the vertical direction hence good surface quality is obtained. The influence of polymerization time, light intensity of DLP projector and chemical composition of the resins on the production speed and the geometrical accuracy of the micro needles have been studied. The length and the tip diameter of the micro needle are shown to be controlled through these factors. The length and tip diameter of the fabricated micro needles were observed using SEM and optical microscope and measured to be around 520 μm and 40 μm, respectively. The results indicate that polymer micro needles with appropriate geometry can be fabricated using this technique. © 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license.
Open Access
Filtering characteristics of hybrid integrated polymer and compound semiconductor waveguides
(IEEE, 2002) Ozturk, C.; Huntington, A.; Aydınlı, Atilla; Byun, Y.T.; Dagli, N.
This paper reports a study on a compact filter fabricated using hybrid integration of compound semiconductors and polymers. A GaAs epilayer is glued onto a polymer channel waveguide forming a highly asymmetrical directional coupler. This approach results in a narrow band filter due to very different dispersion characteristics of the compound semiconductor and the polymer materials. Furthermore, fiber coupling loss has been significantly reduced, since the input and output coupling is done through the polymer waveguide. Filtering characteristics can be engineered by changing the thickness and the length of the semiconductor epilayer. This can be done precisely using etch stop layers and noncritical lithography. The spectral response of such a filter can also be tuned electronically either using the electro-optic properties of the compound semiconductor or the thermo-optic properties of the polymer.
Open Access
Highly polarized light emission by isotropic quantum dots integrated with magnetically aligned segmented nanowires
(American Institute of Physics, 2014) Uran, C.; Erdem, T.; Guzelturk, B.; Perkgöz, N. K.; Jun, S.; Jang, E.; Demir, Hilmi Volkan
In this work, we demonstrate a proof-of-concept system for generating highly polarized light from colloidal quantum dots (QDs) coupled with magnetically aligned segmented Au/Ni/Au nanowires (NWs). Optical characterizations reveal that the optimized QD-NW coupled structures emit highly polarized light with an s-to p-polarization (s/p) contrast as high as 15: 1 corresponding to a degree of polarization of 0.88. These experimental results are supported by the finite-difference time-domain simulations, which demonstrate the interplay between the inter-NW distance and the degree of polarization.
Open Access
Holograms deep inside Silicon
(Optical Society of America, 2016) Makey, Ghaith; Tokel, Onur; Turnalı, Ahmet; Pavlov, Ihor; Elahi, Parviz; Yavuz, Ozg ¨ un; İlday, F. Ömer
Through the Nonlinear Laser Lithography method, we demonstrate the first computer generated holograms fabricated deep inside Silicon. Fourier and Fresnel holograms are fabricated buried inside Si wafers, and a generation algorithm is developed for hologram fabrication. © OSA 2016.
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In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
(Nature Publishing Group, 2017) Tokel, O.; Turnalı, A.; Makey, G.; Elahi, P.; Çolakoǧlu, T.; Ergeçen E.; Yavuz, Ö.; Hübner R.; Borra, M. Z.; Pavlov, I.; Bek, A.; Turan, R.; Kesim, D. K.; Tozburun, S.; Ilday, S.; Ilday, F. Ö.
Silicon is an excellent material for microelectronics and integrated photonics 1-3, with untapped potential for mid-infrared optics 4 . Despite broad recognition of the importance of the third dimension 5,6, current lithography methods do not allow the fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realized with techniques like reactive ion etching. Embedded optical elements 7, electronic devices and better electronic-photonic integration are lacking 8 . Here, we demonstrate laser-based fabrication of complex 3D structures deep inside silicon using 1-μm-sized dots and rod-like structures of adjustable length as basic building blocks. The laser-modified Si has an optical index different to that in unmodified parts, enabling the creation of numerous photonic devices. Optionally, these parts can be chemically etched to produce desired 3D shapes. We exemplify a plethora of subsurface - that is, 'in-chip' - microstructures for microfluidic cooling of chips, vias, micro-electro-mechanical systems, photovoltaic applications and photonic devices that match or surpass corresponding state-of-the-art device performances.
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Investigation of the effect of thermal cycling on the device performance of YBa2Cu3O7-δ DC-SQUIDs
(2007) Avci I.; Algul, B.P.; Bozbey, A.; Akram, R.; Tepe, M.; Abukay, D.
We investigated the effect of thermal cycling on the operational performance of YBa2Cu3O7-δ (YBCO) direct current superconducting quantum interference devices (DC-SQUIDs) fabricated onto 24°SrTiO3 (STO) bicrystal substrates. The devices under investigation consist of directly coupled DC-SQUID magnetometer configurations. Thin films having 200nm thicknesses were deposited by dc-magnetron sputtering and device patterns were made by a standard lithography process and chemical etching. The SQUIDs having 4νm-wide grain boundary Josephson junctions (GBJJs) were characterized by means of critical currents, peak-to-peak output voltages and noise levels, depending on the thermal cycles. In order to achieve a protective layer for the junctions against the undesired effects of thermal cycles and ambient atmosphere during the room temperature storage, the devices were coated with a 400nm thick YBCO layer at room temperature. Since the second layer of amorphous YBCO is completely electrically insulating, it does not affect the operation of the junctions and pick-up coils of magnetometers. This two-layered configuration ensures the protection of the junctions from ambient atmosphere as well as from the effect of water molecules interacting with the film structure during each thermal cycle. © IOP Publishing Ltd.
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Laser-slicing of silicon with 3D nonlinear laser lithography
(OSA, 2017) Tokel, Onur; Turnalı, Ahmet; Çolakoğlu, T.; İlday, Serim; Borra, M. Z.; Pavlov, Ihor; Bek, A.; Turan, R.; İlday, Fatih Ömer
Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
Open Access
Lithography-free metamaterial absorbers: Opinion
(The Optical Society, 2022-02-01) Ghobadi, Amir; Ulusoy Ghobadi, Türkan Gamze; Özbay, Ekmel
Although advancement in nanofabrication provides the opportunity to realize nanoscale geometries with high resolutions, the scalability and repeatability issues limit their large-scale applications. Lithography-free metamaterial absorbers (LFMAs) are a potential route for the upscaling of these designs. With restricted freedom in their synthesis, the importance of the proper material choice is emphasized. Herein, we provide a comprehensive overview of the recently developed LFMAs, from both design and material perspectives, while considering their most promising applications. © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Open Access
Method to enlarge the hologram viewing window using a mirror module
(2009) Kang H.; Ohmura, N.; Yamaguchi, T.; Yoshikawa H.; Kim, S.-C.; Kim, E.-S.
A liquid crystal panel for a video projector is often used for holographic television. However, its pixel size and pixel number are not enough for practical holographic 3-D display. Therefore, a multipanel configuration is generally used to increase the viewing window and displayed image size, and many spatial light modulators should be used in them. We propose a novel method to increase the viewing window of a holographic display system. The proposed method, which is implemented by using a mirror module and 4-f lens set, is to reconfigure the beam shape reflected by a spatial light modulator. The equipment is applied to a holographic display system, which has only a single spatial light modulator; a hologram could be displayed in a wider viewing window by the equipment than that of the conventional method. By the proposed method, the resolution of the reconfigured spatial light modulator has double resolution in the horizontal direction. Inversely, the vertical resolution is decreased. Even if the vertical resolution is decreased, a viewer could get 3-D effect because humans get more 3-D information in the horizontal direction. We have experimented using a liquid crystal on silicon (LcOS), whose resolution is 4096×2160pixels. The reconfigured resolution by the mirror module is 8192×1080pixels. From the experiments, the horizontal viewing window is almost two times wider than that without the mirror module. As a result, the hologram can be observed binocularly. © 2009 Society of Photo-Optical Instrumentation Engineers.
Open Access
Nonlinear laser lithography for enhanced tribological properties
(IEEE, 2015-05) Gnilitskyi, I.; Pavlov, Ihor; Rotundo, F.; Orazi, L.; Martini, C.; İlday, Fatih Ömer
This paper investigates a new field for application of femtosecond laser-induced periodic surface structures (LIPSS). We designed an innovative solution to reduce coefficient of friction of mechanical parts by using the nonlinear laser lithography technique (NLL). © 2015 OSA.
Open Access
Reconfigurable nested ring-split ring transmitarray unit cell employing the element rotation method by microfluidics
(Institute of Electrical and Electronics Engineers, 2015) Erdil, E.; Topalli, K.; Esmaeilzad, N. S.; Zorlu, O.; Kulah, H.; Aydin, C. O.
A continuously tunable, circularly polarized X-band microfluidic transmitarray unit cell employing the element rotation method is designed and fabricated. The unit cell comprises a double layer nested ring-split ring structure realized as microfluidic channels embedded in Polydimethylsiloxane (PDMS) using soft lithography techniques. Conductive regions of the rings are formed by injecting a liquid metal (an alloy of Ga, In, and Sn), whereas the split region is air. Movement of the liquid metal together with the split around the ring provides 360° linear phase shift range in the transmitted field through the unit cell. A circularly polarized unit cell is designed to operate at 8.8 GHz, satisfying the necessary phase shifting conditions provided by the element rotation method. Unit cell prototypes are fabricated and the proposed concept is verified by the measurements using waveguide simulator method, within the frequency range of 8-10 GHz. The agreement between the simulation and measurement results is satisfactory, illustrating the viability of the approach to be used in reconfigurable antennas and antenna arrays.
Open Access
Scaling of diffractive and refractive lenses for optical computing and interconnections
(Optical Society of America, 1994-06-10) Özaktaş, Haldun M.; Urey, H.; Lohmann, A. W.
We discuss both numerically and analytically how the space-bandwidth product and the information density of lenses scale as functions of their diameter and f-number over many orders of magnitude. This information may be useful for the design of optical computing and interconnection systems. For diffractive lenses, cost is defined as the number of resolution elements the lithographic production system must have; the relationship of this quantity to the space-bandwidth product and information density is also given.
Open Access
Spectroscopic investigation of polyvinyl chloride photodegradation in blends with basic traps
(1999) Birer, Özgür
Polyvinyl chloride degrades via loss of HCI when it is exposed to heat, energetic particles or photons. The mechanism is known as the zip mechanism and results in conjugated segments, polyenes. Degradation also leads to loss of mechanical properties of PVC. However, from another point of view, PVC is a Bronsted acid source, with controllable emission. Furthermore, the polyenes are small segments of polyacetylene, which itself is a very interesting one-dimensional system. Understanding the building blocks clearly helps to envisage larger systems. This study has two main goals. The first goal is benefiting from the radiation induced in-situ created HCI by incorporating basic traps into the polymer matrix and inducing optical or electrical conductivity changes. The second goal is to tune the wavelength of photodegradation by introducing sensitisers into the polymer matrix to affect the chain length of the polyenes. For the first part of the study, pH indicators, and basic forms of conducting polymers were blended with PVC and the films were irradiated with UV radiation. Optical changes were monitored with UV-Vis-NIR Spectroscopy. Similar to several other dyes tried, Bromcresol Green, and Methyl Violet changed their optical properties when they were exposed to UV radiation in the PVC matrix. However, Methyl Violet, being resistant to UV radiation, proved to be a suitable component for possible dosimetric and lithographic applications. Basic forms of polyaniline and poly-2-chloro aniline were blended with PVC, and upon irradiation of the blend, they were converted to conducting salt forms as a result of doping with in-situ created HCI. The structural changes were monitored with UV-Vis-NIR spectrophotometry as well as FTIR spectroscopy. PVC/2-CI PAN I blends gave better results compared to PVC/PANI blends. For the second part of the study, hydroquinone, anthraquinone, and anthracene were introduced into the PVC matrix. The samples were irradiated with monochromatic UV radiation at the absorption maxima of these sensitisers. It was established that the nature of polyene formation is dependent on the wavelength of irradiation as well as the amount of energy transferred to the PVC chains.
Open Access
Ultra-low-cost near-infrared photodetectors on silicon
(SPIE, 2015-02) Nazirzadeh, M. Amin; Atar, Fatih B.; Turgut, B. Berkan; Okyay, Ali Kemal
We demonstrate Silicon-only near-infrared (NIR) photodetectors (sensitive up to 2000 nm) that meet large-scale ultralow-cost fabrication requirements. For the detection of infrared photons, we use metal nanoislands that form Schottky contact with Silicon. NIR photons excite plasmon resonances at metal nanoislands and plasmons decay into highly energetic charge carriers (hot electrons). These hot electrons get injected into Silicon (internal photoemission), resulting in photocurrent. Several groups have studied plasmonic nanoantennas using high resolution lithography techniques. In this work, we make use of randomly formed nanoislands for broad-band photoresponse at NIR wavelengths. We observe photoresponse up to 2000 nm wavelength with low dark current density about 50 pA/μm2. The devices exhibit photoresponsivity values as high as 2 mA/W and 600 μA/W at 1.3 μm and 1.55 μm wavelengths, respectively. Thin metal layer was deposited on low-doped n-type Silicon wafer. Rapid thermal annealing results in surface reconstruction of the metal layer into nanoislands. Annealing conditions control the average size of the nanoislands and photoresponse of the devices. An Al-doped Zinc Oxide (AZO) layer was deposited on the nanoislands using thermal atomic layer deposition (ALD) technique to acts as a transparent conductive oxide (TCO) and patterned using photolithography. AZO film creates electrical connection between the nanoislands and also makes a heterojunction to Silicon. Simple and scalable fabrication on Si substrates without the need for any sub-micron lithography or high temperature epitaxy process make these devices good candidates for ultra-low-cost broad-band NIR imaging and spectroscopy applications. © 2015 SPIE.