Laser-slicing of silicon with 3D nonlinear laser lithography

Date

2017

Authors

Tokel, Onur
Turnalı, Ahmet
Çolakoğlu, T.
İlday, Serim
Borra, M. Z.
Pavlov, Ihor
Bek, A.
Turan, R.
İlday, Fatih Ömer

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Abstract

Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.

Source Title

Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017

Publisher

OSA

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Published Version (Please cite this version)

Language

English