Laser-slicing of silicon with 3D nonlinear laser lithography
Date
2017
Authors
Tokel, Onur
Turnalı, Ahmet
Çolakoğlu, T.
İlday, Serim
Borra, M. Z.
Pavlov, Ihor
Bek, A.
Turan, R.
İlday, Fatih Ömer
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Abstract
Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
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Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017
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OSA
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Language
English