Effect of processing options on ultra-low-loss lead-magnesium-niobium titanate thin films for high density capacitors
Date
2013
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Source Title
Thin Solid Films
Print ISSN
0040-6090
Electronic ISSN
Publisher
Elsevier
Volume
541
Issue
Special issue: Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III
Pages
117 - 120
Language
English
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Abstract
This work studies the impact of annealing temperatures on PMNT (lead-magnesium niobate-lead titanate, Pb(Mg0.33Nb 0.67)0.65Ti0.35O3) thin films grown on a silicon substrate. The electrical properties of the thin films, such as dielectric constant and loss tangent, are shown to depend strongly on the annealing temperature, with the best electrical properties being achieved at the highest annealing temperature. It is seen that the perovskite phase is highest in the sample annealed at 750 C indicating that a relatively high temperature is necessary for complete transition of PMNT to the perovskite phase. The sample annealed at 400 C exhibits the lowest loss tangent of approximately 0.007 at a frequency of 1 MHz. © 2012 Elsevier B.V.
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Keywords
Loss tangent , PMNT , Sol-gel , Thin films , Annealing temperatures , High density capacitors , High temperature , Lead magnesium niobate-lead titanates , Loss tangent , Perovskite phase , PMNT , Silicon substrates , Annealing , Magnesium , Perovskite , Sol-gel process , Sol-gels , Thin films , Electric properties