Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
buir.contributor.orcid | Özbay, Ekmel|0000-0003-2953-1828 | |
dc.contributor.author | Ozer, Z. | en_US |
dc.contributor.author | Mamedov, Amirullah M. | en_US |
dc.contributor.author | Özbay, Ekmel | en_US |
dc.coverage.spatial | Aveiro, Portugal | en_US |
dc.date.accessioned | 2016-02-08T12:12:25Z | |
dc.date.available | 2016-02-08T12:12:25Z | |
dc.date.issued | 2012 | en_US |
dc.department | Nanotechnology Research Center (NANOTAM) | en_US |
dc.description | Date of Conference: 9-13 July 2012 | en_US |
dc.description.abstract | This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE. | en_US |
dc.description.provenance | Made available in DSpace on 2016-02-08T12:12:25Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2012 | en |
dc.identifier.doi | 10.1109/ISAF.2012.6297779 | en_US |
dc.identifier.uri | http://hdl.handle.net/11693/28147 | |
dc.language.iso | English | en_US |
dc.publisher | IEEE | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1109/ISAF.2012.6297779 | en_US |
dc.source.title | Proceedings of ISAF-ECAPD-PFM 2012 | en_US |
dc.subject | FEM | en_US |
dc.subject | ferroelectrics | en_US |
dc.subject | MEMS | en_US |
dc.subject | Design and modeling | en_US |
dc.subject | Ferroelectric compounds | en_US |
dc.subject | Finite element models | en_US |
dc.subject | Inertial measurement unit | en_US |
dc.subject | Micro-gyroscope | en_US |
dc.subject | Modeling and simulation | en_US |
dc.subject | PZT | en_US |
dc.subject | TiO | en_US |
dc.subject | Computer simulation | en_US |
dc.subject | Ferroelectricity | en_US |
dc.subject | Finite element method | en_US |
dc.subject | MEMS | en_US |
dc.subject | Units of measurement | en_US |
dc.subject | Ferroelectric materials | en_US |
dc.title | Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation | en_US |
dc.type | Conference Paper | en_US |
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