Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation

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buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.contributor.authorOzer, Z.en_US
dc.contributor.authorMamedov, Amirullah M.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.coverage.spatialAveiro, Portugalen_US
dc.date.accessioned2016-02-08T12:12:25Z
dc.date.available2016-02-08T12:12:25Z
dc.date.issued2012en_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.descriptionDate of Conference: 9-13 July 2012en_US
dc.description.abstractThis paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T12:12:25Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2012en
dc.identifier.doi10.1109/ISAF.2012.6297779en_US
dc.identifier.urihttp://hdl.handle.net/11693/28147
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ISAF.2012.6297779en_US
dc.source.titleProceedings of ISAF-ECAPD-PFM 2012en_US
dc.subjectFEMen_US
dc.subjectferroelectricsen_US
dc.subjectMEMSen_US
dc.subjectDesign and modelingen_US
dc.subjectFerroelectric compoundsen_US
dc.subjectFinite element modelsen_US
dc.subjectInertial measurement uniten_US
dc.subjectMicro-gyroscopeen_US
dc.subjectModeling and simulationen_US
dc.subjectPZTen_US
dc.subjectTiOen_US
dc.subjectComputer simulationen_US
dc.subjectFerroelectricityen_US
dc.subjectFinite element methoden_US
dc.subjectMEMSen_US
dc.subjectUnits of measurementen_US
dc.subjectFerroelectric materialsen_US
dc.titleFerroelectric based microgyroscope for inertial measurement unit: Modeling and simulationen_US
dc.typeConference Paperen_US

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