Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation

Date

2012

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Abstract

This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.

Source Title

Proceedings of ISAF-ECAPD-PFM 2012

Publisher

IEEE

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Keywords

FEM, ferroelectrics, MEMS, Design and modeling, Ferroelectric compounds, Finite element models, Inertial measurement unit, Micro-gyroscope, Modeling and simulation, PZT, TiO, Computer simulation, Ferroelectricity, Finite element method, MEMS, Units of measurement, Ferroelectric materials

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http://hdl.handle.net/11693/28147

Published Version (Please cite this version)

http://dx.doi.org/10.1109/ISAF.2012.6297779

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Scholarly Publications - NANOTAM

Language

English

Type

Conference Paper