Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
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2012
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This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.
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Proceedings of ISAF-ECAPD-PFM 2012
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IEEE
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English