Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
Date
2012
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Source Title
Proceedings of ISAF-ECAPD-PFM 2012
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IEEE
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English
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Abstract
This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.
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Keywords
FEM , ferroelectrics , MEMS , Design and modeling , Ferroelectric compounds , Finite element models , Inertial measurement unit , Micro-gyroscope , Modeling and simulation , PZT , TiO , Computer simulation , Ferroelectricity , Finite element method , MEMS , Units of measurement , Ferroelectric materials