Physical model for subsurface silicon writing

Date
2016
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Proceedings of the 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
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IEEE
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English
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Abstract

We have recently reported a direct laser writing method enabling buried structures deep inside silicon. Here we study the formation of these subsurface structures. We take advantage of Nonlinearity Engineering to understand this new phenomenon.

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