Improved drain lag by reduced surface current in GaN HEMT via an ultrathin HfO2 blanket layer

Abstract

This paper reports the influence of an ultrathin 1.5nm atomic-layer-deposited HfO2 blanket layer as a gate dielectric on GaN high-electron-mobility transistors (HEMTs) grown on a 4H-SiC substrate. Transistors with a gate length of 250nm and a source-to-drain distance of 3µmwere manufactured. The proposed technique involves HfO2 deposition at 250◦C prior to the gate metallization with no additional lithography steps. This approach reduced the drain lag by 83%compared to the conventional design with no gate dielectric. The HfO2 layer suppressed the parasitic lateral conduction from the gate, reduced surface trapping, and improved gate electrostatics. The manufactured devices exhibited nearly three orders of magnitude decreased surface leakage, better turn-on behavior, and improved cut-off frequency fT linearity by 16%. High quality metal-oxide interface formation was confirmed by the conductance method. Results demonstrate that the blanket HfO2 deposition is a promising approach to improve the current dispersion characteristics and gate electrostatics of GaN HEMTs without incurring major changes to the established fabrication techniques.