Atomic layer deposition of functional III-Nitride thin films & nano-structures

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buir.contributor.orcidUyar, Tamer|0000-0002-3989-4481
dc.contributor.authorBıyıklı, N.en_US
dc.contributor.authorOzgit-Akgun, C.en_US
dc.contributor.authorDönmez, İ.en_US
dc.contributor.authorKayacı, F.en_US
dc.contributor.authorUyar, Tameren_US
dc.coverage.spatialAntalya, Turkeyen_US
dc.date.accessioned2019-07-09T06:21:49Z
dc.date.available2019-07-09T06:21:49Z
dc.date.issued2012en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionDate of Conference: 26-29 April 2012en_US
dc.identifier.urihttp://hdl.handle.net/11693/52157
dc.language.isoEnglishen_US
dc.source.title2nd Advances in Applied Physics and Materials Science (APMAS) Congressen_US
dc.titleAtomic layer deposition of functional III-Nitride thin films & nano-structuresen_US
dc.typeConference Paperen_US

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