An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1477en_US
dc.citation.issueNumber7en_US
dc.citation.spage1468en_US
dc.citation.volumeNumber58en_US
dc.contributor.authorOlcum, S.en_US
dc.contributor.authorYamaner, F. Y.en_US
dc.contributor.authorBozkurt, A.en_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.date.accessioned2016-02-08T09:52:22Z
dc.date.available2016-02-08T09:52:22Z
dc.date.issued2011en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractThe collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T09:52:22Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2011en
dc.description.sponsorshipThe Scientific and Technological Research Council of Turkey (TUBITAK)en_US
dc.identifier.doi10.1109/TUFFC.2011.1966en_US
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/21877
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/TUFFC.2011.1966en_US
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Controlen_US
dc.subjectCapacitive micromachined ultrasonic transduceren_US
dc.subjectCircuit modelsen_US
dc.subjectCollapse modeen_US
dc.subjectDesign and optimizationen_US
dc.subjectElectrical excitationen_US
dc.subjectEquivalent circuit modelen_US
dc.subjectHigh outputen_US
dc.subjectMechanical parametersen_US
dc.subjectSmall signalen_US
dc.subjectTransient behavioren_US
dc.subjectCircuit theoryen_US
dc.subjectCollapsible tubesen_US
dc.subjectUltrasonic equipmenten_US
dc.subjectUltrasonic transducersen_US
dc.subjectMicrotechnologyen_US
dc.titleAn equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse modeen_US
dc.typeArticleen_US

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