An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode

Date
2011
Advisor
Instructor
Source Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Print ISSN
0885-3010
Electronic ISSN
Publisher
IEEE
Volume
58
Issue
7
Pages
1468 - 1477
Language
English
Type
Article
Journal Title
Journal ISSN
Volume Title
Abstract

The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs.

Course
Other identifiers
Book Title
Keywords
Capacitive micromachined ultrasonic transducer, Circuit models, Collapse mode, Design and optimization, Electrical excitation, Equivalent circuit model, High output, Mechanical parameters, Small signal, Transient behavior, Circuit theory, Collapsible tubes, Ultrasonic equipment, Ultrasonic transducers, Microtechnology
Citation
Published Version (Please cite this version)