The impact of increasing number of growth cycles on the properties of AIN thin films grown at low temperature by plasma enhanced atomic layer deposition
| dc.contributor.author | Alevli, M. | en_US |
| dc.contributor.author | Ozgit-Akgun, C. | en_US |
| dc.contributor.author | Bıyıklı, N. | en_US |
| dc.coverage.spatial | Dresden, Germany | en_US |
| dc.date.accessioned | 2019-07-09T05:59:32Z | |
| dc.date.available | 2019-07-09T05:59:32Z | |
| dc.date.issued | 2012 | en_US |
| dc.department | Institute of Materials Science and Nanotechnology (UNAM) | en_US |
| dc.description | Date of Conference: 17-20 June 2012 | en_US |
| dc.identifier.uri | http://hdl.handle.net/11693/52153 | |
| dc.language.iso | English | en_US |
| dc.source.title | 12th International Conference on Atomic Layer Deposition (ALD 2012) | en_US |
| dc.title | The impact of increasing number of growth cycles on the properties of AIN thin films grown at low temperature by plasma enhanced atomic layer deposition | en_US |
| dc.type | Conference Paper | en_US |