Grating loaded integrated optical cantilevers

buir.advisorAydınlı, Atilla
dc.contributor.authorKarademir, Ertuğrul
dc.date.accessioned2016-01-08T19:38:28Z
dc.date.available2016-01-08T19:38:28Z
dc.date.issued2010
dc.departmentDepartment of Physicsen_US
dc.descriptionAnkara : The Department of Physics and the Institute of Engineering and Sciences of Bilkent University, 2010.en_US
dc.descriptionIncludes bibliographical references leaves 47-52.en_US
dc.description.abstractCantilever beams are the most important parts of standard scanning probe microscopy. In this work, an integrated optical approach to sense the deflection of a cantilever beam is suggested and realized. A grating coupler loaded on the upper surface of the cantilever beam couples the incident light to the chip, which is then conveyed through a taper structure to a waveguide to be detected by a photodiode. Deflections of the cantilever beam change the optical path and hence the total transmitted intensity. Finally an optical signal is produced and this signal is measured. Resonance peak of 27.2 Q factor is obtained, which could be further enhanced by proper vibration isolation and employment of vacuum environment.en_US
dc.description.degreeM.S.en_US
dc.description.statementofresponsibilityKarademir, Ertuğrulen_US
dc.format.extentxi, 52 leaves, illustrations, graphsen_US
dc.identifier.itemidB122712
dc.identifier.urihttp://hdl.handle.net/11693/16022
dc.language.isoEnglishen_US
dc.publisherBilkent Universityen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectCantileveren_US
dc.subjectGratingen_US
dc.subjectDisplacement Sensoren_US
dc.subjectIntegrated Opticsen_US
dc.subjectScanning Probe Microscopyen_US
dc.subject.lccQH212.S33 K37 2010en_US
dc.subject.lcshScanning probe microscopy.en_US
dc.subject.lcshIntegrated optics.en_US
dc.titleGrating loaded integrated optical cantileversen_US
dc.typeThesisen_US
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