Grating loaded integrated optical cantilevers

Date
2010
Advisor
Aydınlı, Atilla
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Publisher
Bilkent University
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Language
English
Type
Thesis
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Abstract

Cantilever beams are the most important parts of standard scanning probe microscopy. In this work, an integrated optical approach to sense the deflection of a cantilever beam is suggested and realized. A grating coupler loaded on the upper surface of the cantilever beam couples the incident light to the chip, which is then conveyed through a taper structure to a waveguide to be detected by a photodiode. Deflections of the cantilever beam change the optical path and hence the total transmitted intensity. Finally an optical signal is produced and this signal is measured. Resonance peak of 27.2 Q factor is obtained, which could be further enhanced by proper vibration isolation and employment of vacuum environment.

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Keywords
Cantilever, Grating, Displacement Sensor, Integrated Optics, Scanning Probe Microscopy
Citation
Published Version (Please cite this version)