Surface evolution of 4H-SiC(0001) during in-situ surface preparation and its influence on graphene properties

Date

2013

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Source Title

Materials Science Forum

Print ISSN

0255-5476

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Trans Tech Publications, Switzerland

Volume

740-742

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Pages

157 - 160

Language

English

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Abstract

The evolution of SiC surface morphology during graphene growth process has been studied through the comparison of substrate surface step structure after in-situ etching and graphene growth in vacuum. Influence of in-situ substrate surface preparation on the properties of graphene was studied through the comparison of graphene layers on etched and un-etched substrates grown under same conditions. © (2013) Trans Tech Publications, Switzerland.

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