Visible photoluminescence from thin films of SiOx prepared by low-temperature plasmachemical deposition

Date

1994-07-26

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Source Title

Soviet Technical Physics Letters = Письма в Журнал Tехнической Физики

Print ISSN

0360-120X

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Publisher

American Institute of Physics

Volume

20

Issue

14

Pages

79 - 85

Language

Russian

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Published Version (Please cite this version)