LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

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buir.contributor.authorOkyay, Ali Kemal
dc.citation.epage037106-5en_US
dc.citation.issueNumber3en_US
dc.citation.spage037106-1en_US
dc.citation.volumeNumber56en_US
dc.contributor.authorPoyraz, M.en_US
dc.contributor.authorGorgulu, K.en_US
dc.contributor.authorSisman, Z.en_US
dc.contributor.authorTanrikulu, M. Y.en_US
dc.contributor.authorOkyay, Ali Kemalen_US
dc.date.accessioned2018-04-12T11:02:12Z
dc.date.available2018-04-12T11:02:12Z
dc.date.issued2017en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractWe propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).en_US
dc.description.provenanceMade available in DSpace on 2018-04-12T11:02:12Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 179475 bytes, checksum: ea0bedeb05ac9ccfb983c327e155f0c2 (MD5) Previous issue date: 2017en
dc.identifier.doi10.1117/1.OE.56.3.037106en_US
dc.identifier.issn0091-3286
dc.identifier.urihttp://hdl.handle.net/11693/37076
dc.language.isoEnglishen_US
dc.publisherSPIEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1117/1.OE.56.3.037106en_US
dc.source.titleOptical Engineeringen_US
dc.subjectAtomic layer depositionen_US
dc.subjectMicrobolometersen_US
dc.subjectUncooled infrared imagingen_US
dc.subjectZinc oxideen_US
dc.subjectAtomic layer depositionen_US
dc.subjectAtomsen_US
dc.subjectBolometersen_US
dc.subjectDepositionen_US
dc.subjectInfrared imagingen_US
dc.subjectTemperature sensorsen_US
dc.subjectThermography (imaging)en_US
dc.subjectAbsorption co-efficienten_US
dc.subjectBi-layer structureen_US
dc.subjectLong-wave infrared regimesen_US
dc.subjectMicro-bolometersen_US
dc.subjectSingle-layer structureen_US
dc.subjectThermal simulationsen_US
dc.subjectTime constantsen_US
dc.subjectInfrared radiationen_US
dc.titleLWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imagingen_US
dc.typeArticleen_US

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