Analysis of quadrature and frequency split in a MEMS vibrating ring gyroscope with structural imperfections

buir.contributor.authorHosseini-Pishrobat, Mehran
buir.contributor.authorTatar, Erdinç
buir.contributor.orcidHosseini-Pishrobat, Mehran|0000-0002-5866-5131
dc.citation.epage1294en_US
dc.citation.spage1291en_US
dc.contributor.authorHosseini-Pishrobat, Mehran
dc.contributor.authorTatar, Erdinç
dc.coverage.spatialOrlando, FL, USAen_US
dc.date.accessioned2022-02-09T06:08:42Z
dc.date.available2022-02-09T06:08:42Z
dc.date.issued2021-08-06
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionConference Name: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)en_US
dc.descriptionDate of Conference: 20-24 June 2021en_US
dc.description.abstractStructural imperfections affect the performance of MEMS vibrating ring gyroscopes (VRGs), dominantly in terms of quadrature error and frequency split. We consider a VRG with a ring subjected to width nonuniformity and supported by an imperfect suspension. This reflects the scenario of nonuniform etching, common in microfabrication processes. We show that the ring's width nonuniformity mainly results in a rotation of the mode-shapes with respect to those of a perfect ring while an imperfect suspension induces frequency split between the modes. On this basis, we calculate the quadrature error in the gyroscope's output. As an example, a 4° mode-shape rotation and 15Hz frequency split in a 60kHz VRG generate an approximate quadrature error of 1000°/s.en_US
dc.description.provenanceSubmitted by Betül Özen (ozen@bilkent.edu.tr) on 2022-02-09T06:08:42Z No. of bitstreams: 1 Analysis_of_Quadrature_and_Frequency_Split_in_a_Mems_Vibrating_Ring_Gyroscope_with_Structural_Imperfections.pdf: 608856 bytes, checksum: a950e58444eb3da43ae1c9b7ab7b7437 (MD5)en
dc.description.provenanceMade available in DSpace on 2022-02-09T06:08:42Z (GMT). No. of bitstreams: 1 Analysis_of_Quadrature_and_Frequency_Split_in_a_Mems_Vibrating_Ring_Gyroscope_with_Structural_Imperfections.pdf: 608856 bytes, checksum: a950e58444eb3da43ae1c9b7ab7b7437 (MD5) Previous issue date: 2021-08-06en
dc.identifier.doi10.1109/Transducers50396.2021.9495619en_US
dc.identifier.eisbn978-1-6654-1267-4
dc.identifier.eissn2167-0021
dc.identifier.isbn978-1-6654-4845-1
dc.identifier.issn2167-0013
dc.identifier.urihttp://hdl.handle.net/11693/77140
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://dx.doi.org/10.1109/Transducers50396.2021.9495619en_US
dc.source.titleInternational Conference on Solid State Sensors and Actuators (TRANSDUCERS)en_US
dc.subjectFrequency spliten_US
dc.subjectMEMS gyroscopeen_US
dc.subjectQuadrature erroren_US
dc.subjectVibrating ringen_US
dc.titleAnalysis of quadrature and frequency split in a MEMS vibrating ring gyroscope with structural imperfectionsen_US
dc.typeConference Paperen_US

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