Experimental characterization of capacitive micromachined ultrasonic transducers

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage2134en_US
dc.citation.spage2131en_US
dc.contributor.authorÖlçüm, Selimen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorOğuz, Kağanen_US
dc.contributor.authorŞenlik, Muhammed N.en_US
dc.coverage.spatialNew York, NY, USAen_US
dc.date.accessioned2016-02-08T11:42:01Z
dc.date.available2016-02-08T11:42:01Z
dc.date.issued2007en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionDate of Conference: 28-31 October 2007en_US
dc.descriptionConference Name: Ultrasonics Symposium, IEEE 2007en_US
dc.description.abstractIn this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T11:42:01Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2007en
dc.identifier.doi10.1109/ULTSYM.2007.536en_US
dc.identifier.issn1051-0117
dc.identifier.urihttp://hdl.handle.net/11693/27017
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2007.536en_US
dc.source.titleProceedings of the Ultrasonics Symposium, IEEE 2007en_US
dc.subjectCapacitive micromachined ultrasonic transducersen_US
dc.subjectcMUTen_US
dc.subjectElectroacoustic transducersen_US
dc.subjectExperimentsen_US
dc.subjectFlow of fluidsen_US
dc.subjectMicromachiningen_US
dc.subjectOptical designen_US
dc.subjectTransducersen_US
dc.subjectUltrasonic equipmenten_US
dc.subjectUltrasonic measurementen_US
dc.subjectUltrasonic wavesen_US
dc.subjectUltrasonicsen_US
dc.subjectExperimental characterizationen_US
dc.subjectFabricated devicesen_US
dc.subjectPitch-catchen_US
dc.subjectPulse echoesen_US
dc.subjectSurface micromachining processesen_US
dc.subjectTesting proceduresen_US
dc.subjectUltrasonic transducersen_US
dc.titleExperimental characterization of capacitive micromachined ultrasonic transducersen_US
dc.typeConference Paperen_US

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