Pressure sensing using micromachined asymmetric integrated vertical coupler

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buir.contributor.authorAydınlı, Atilla
dc.citation.epage516en_US
dc.citation.spage515en_US
dc.contributor.authorKıyat, İsaen_US
dc.contributor.authorKocabaş, Coşkunen_US
dc.contributor.authorAydınlı, Atillaen_US
dc.coverage.spatialTucson, AZ, USAen_US
dc.date.accessioned2016-02-08T11:54:31Z
dc.date.available2016-02-08T11:54:31Z
dc.date.issued2003en_US
dc.departmentDepartment of Physicsen_US
dc.descriptionDate of Conference: 27-28 October 2003en_US
dc.descriptionConference Name: 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003en_US
dc.description.abstractAnalysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.en_US
dc.identifier.doi10.1109/LEOS.2003.1252900en_US
dc.identifier.issn1092-8081en_US
dc.identifier.urihttp://hdl.handle.net/11693/27479
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://doi.org/10.1109/LEOS.2003.1252900en_US
dc.source.titleProceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003en_US
dc.subjectComputer simulationen_US
dc.subjectFinite element methoden_US
dc.subjectIntegrated optoelectronicsen_US
dc.subjectOptical waveguidesen_US
dc.subjectPressure measurementen_US
dc.subjectRefractive indexen_US
dc.subjectSilicon on insulator technologyen_US
dc.subjectSingle mode fibersen_US
dc.subjectTwo dimensionalen_US
dc.subjectBeam propagation methoden_US
dc.subjectIntegrated vertical coupleren_US
dc.subjectSingle mode waveguideen_US
dc.subjectOptical sensorsen_US
dc.titlePressure sensing using micromachined asymmetric integrated vertical coupleren_US
dc.typeConference Paperen_US

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