Pressure sensing using micromachined asymmetric integrated vertical coupler
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
515 - 516
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Computer simulation, Finite element method, Integrated optoelectronics, Optical waveguides, Pressure measurement, Refractive index, Silicon on insulator technology, Single mode fibers, Two dimensional, Beam propagation method, Integrated vertical coupler, Single mode waveguide, Optical sensors