Pressure sensing using micromachined asymmetric integrated vertical coupler
Date
2003
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Source Title
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
Print ISSN
1092-8081
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Publisher
IEEE
Volume
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Pages
515 - 516
Language
English
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Abstract
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
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Keywords
Computer simulation , Finite element method , Integrated optoelectronics , Optical waveguides , Pressure measurement , Refractive index , Silicon on insulator technology , Single mode fibers , Two dimensional , Beam propagation method , Integrated vertical coupler , Single mode waveguide , Optical sensors