Pressure sensing using micromachined asymmetric integrated vertical coupler

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Pressure sensing using micromachined asymmetric integrated vertical coupler.pdf (160.23 KB)

Date

2003

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Abstract

Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.

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Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003

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IEEE

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Keywords

Computer simulation, Finite element method, Integrated optoelectronics, Optical waveguides, Pressure measurement, Refractive index, Silicon on insulator technology, Single mode fibers, Two dimensional, Beam propagation method, Integrated vertical coupler, Single mode waveguide, Optical sensors

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http://hdl.handle.net/11693/27479

Published Version (Please cite this version)

https://doi.org/10.1109/LEOS.2003.1252900

Collections

Scholarly Publications - Physics

Language

English

Type

Conference Paper