Pressure sensing using micromachined asymmetric integrated vertical coupler
Date
2003
Authors
Advisor
Instructor
Source Title
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
Print ISSN
1092-8081
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
515 - 516
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Course
Other identifiers
Book Title
Keywords
Computer simulation, Finite element method, Integrated optoelectronics, Optical waveguides, Pressure measurement, Refractive index, Silicon on insulator technology, Single mode fibers, Two dimensional, Beam propagation method, Integrated vertical coupler, Single mode waveguide, Optical sensors