Novel integrated optical displacement sensor for scanning force microscopies

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buir.contributor.authorAydınlı, Atilla
dc.citation.epage518en_US
dc.citation.spage517en_US
dc.contributor.authorAydınlı, Atillaen_US
dc.contributor.authorKıyat, İsaen_US
dc.contributor.authorKocabaş, Coşkunen_US
dc.coverage.spatialTucson, AZ, USA,en_US
dc.date.accessioned2016-02-08T11:54:30Z
dc.date.available2016-02-08T11:54:30Z
dc.date.issued2003en_US
dc.departmentDepartment of Physicsen_US
dc.descriptionDate of Conference: 27-28 October 2003en_US
dc.descriptionConference Name: 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003en_US
dc.description.abstractA novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.en_US
dc.identifier.doi10.1109/LEOS.2003.1252901en_US
dc.identifier.issn1092-8081en_US
dc.identifier.urihttp://hdl.handle.net/11693/27478
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://doi.org/10.1109/LEOS.2003.1252901en_US
dc.source.titleProceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003en_US
dc.subjectComputer simulationen_US
dc.subjectFinite element methoden_US
dc.subjectIntegrated optoelectronicsen_US
dc.subjectMicroscopic examinationen_US
dc.subjectOptical designen_US
dc.subjectOptical resonatorsen_US
dc.subjectOptical waveguidesen_US
dc.subjectPhotoelasticityen_US
dc.subjectRefractive indexen_US
dc.subjectStrain measurementen_US
dc.subjectThree dimensionalen_US
dc.subjectMicro-ring resonatoren_US
dc.subjectOptical displacement sensoren_US
dc.subjectScanning force microscopyen_US
dc.subjectSoftware Package ANSYSen_US
dc.subjectOptical sensorsen_US
dc.titleNovel integrated optical displacement sensor for scanning force microscopiesen_US
dc.typeConference Paperen_US

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