Novel integrated optical displacement sensor for scanning force microscopies
Date
2003
Authors
Advisor
Instructor
Source Title
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
Print ISSN
1092-8081
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
517 - 518
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
Course
Other identifiers
Book Title
Keywords
Computer simulation, Finite element method, Integrated optoelectronics, Microscopic examination, Optical design, Optical resonators, Optical waveguides, Photoelasticity, Refractive index, Strain measurement, Three dimensional, Micro-ring resonator, Optical displacement sensor, Scanning force microscopy, Software Package ANSYS, Optical sensors