Novel integrated optical displacement sensor for scanning force microscopies
Date
2003
Authors
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Source Title
Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003
Print ISSN
1092-8081
Electronic ISSN
Publisher
IEEE
Volume
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Pages
517 - 518
Language
English
Type
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Abstract
A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
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Keywords
Computer simulation , Finite element method , Integrated optoelectronics , Microscopic examination , Optical design , Optical resonators , Optical waveguides , Photoelasticity , Refractive index , Strain measurement , Three dimensional , Micro-ring resonator , Optical displacement sensor , Scanning force microscopy , Software Package ANSYS , Optical sensors