Novel integrated optical displacement sensor for scanning force microscopies

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Novel integrated optical displacement sensor for scanning force microscopies.pdf (212.43 KB)

Date

2003

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Abstract

A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.

Source Title

Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003

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IEEE

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Keywords

Computer simulation, Finite element method, Integrated optoelectronics, Microscopic examination, Optical design, Optical resonators, Optical waveguides, Photoelasticity, Refractive index, Strain measurement, Three dimensional, Micro-ring resonator, Optical displacement sensor, Scanning force microscopy, Software Package ANSYS, Optical sensors

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http://hdl.handle.net/11693/27478

Published Version (Please cite this version)

https://doi.org/10.1109/LEOS.2003.1252901

Collections

Scholarly Publications - Physics

Language

English

Type

Conference Paper