Novel integrated optical displacement sensor for scanning force microscopies

Files

Novel integrated optical displacement sensor for scanning force microscopies.pdf (212.43 KB)

Date

2003

Authors

Editor(s)

Advisor

Supervisor

Co-Advisor

Co-Supervisor

Instructor

BUIR Usage Stats
1
views
22
downloads

Citation Stats

  • Share

Series

Abstract

A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.

Source Title

Proceedings of the 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003

Publisher

IEEE

Course

Other identifiers

Book Title

Keywords

Computer simulation, Finite element method, Integrated optoelectronics, Microscopic examination, Optical design, Optical resonators, Optical waveguides, Photoelasticity, Refractive index, Strain measurement, Three dimensional, Micro-ring resonator, Optical displacement sensor, Scanning force microscopy, Software Package ANSYS, Optical sensors

Degree Discipline

Degree Level

Degree Name

Citation

Permalink

http://hdl.handle.net/11693/27478

Published Version (Please cite this version)

https://doi.org/10.1109/LEOS.2003.1252901

Collections

Scholarly Publications - Physics

Language

English

Type

Conference Paper