Design and analysis of a modular learning based cross-coupled control algorithm for multi-axis precision positioning systems

dc.citation.epage281en_US
dc.citation.issueNumber1en_US
dc.citation.spage272en_US
dc.citation.volumeNumber14en_US
dc.contributor.authorUlu, N. G.en_US
dc.contributor.authorUlu E.en_US
dc.contributor.authorCakmakci, M.en_US
dc.date.accessioned2018-04-12T10:56:35Z
dc.date.available2018-04-12T10:56:35Z
dc.date.issued2016en_US
dc.departmentDepartment of Mechanical Engineeringen_US
dc.description.abstractIncreasing demand for micro/nano-technology related equipment resulted in growing interest for precision positioning systems. In this paper a modular controller combining cross-coupled control and iterative learning control approaches to improve contour and tracking accuracy at the same time is presented. Instead of using the standard error estimation technique, a computationally efficient and modular contour error estimation technique is used. The new controller is more suitable for tracking arbitrary nonlinear contours and easier to implement to multi-axis systems. Stability and convergence analysis for the proposed controller is presented with the necessary conditions. Effectiveness of the control design is verified with simulations and experiments on a two-axis positioning system. The resulting positioning system achieves nanometer level contouring and tracking performance. © 2016, Institute of Control, Robotics and Systems and The Korean Institute of Electrical Engineers and Springer-Verlag Berlin Heidelberg.en_US
dc.identifier.doi10.1007/s12555-014-0125-1en_US
dc.identifier.issn1598-6446
dc.identifier.urihttp://hdl.handle.net/11693/36887
dc.language.isoEnglishen_US
dc.publisherInstitute of Control, Robotics and Systemsen_US
dc.relation.isversionofhttp://dx.doi.org/10.1007/s12555-014-0125-1en_US
dc.source.titleInternational Journal of Control, Automation and Systemsen_US
dc.subjectCross-coupled controlen_US
dc.subjectIterative learningen_US
dc.subjectMechatronic modularityen_US
dc.subjectNano-positioningen_US
dc.subjectAlgorithmsen_US
dc.subjectIterative methodsen_US
dc.subjectMotion controlen_US
dc.subjectComputationally efficienten_US
dc.titleDesign and analysis of a modular learning based cross-coupled control algorithm for multi-axis precision positioning systemsen_US
dc.typeArticleen_US

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