High‐performance acoustic microscope

Abstract

A commercial scanning acoustic microscope operating in the frequency range of 50–2000 MHz is described. It has a stable scan mechanism suitable for the high‐frequency end to give high‐resolution images and modes to allow for material characterization at the low‐frequency end. The high‐frequency electronics permitting a wideband operation with a variety of acoustic lenses are described. Microprocessors control many parts of the the instrument to release the user from the routine adjustments, resulting in a user‐friendly interface. Images are presented to show the resolution and penetration abilities of the instrument at several frequencies, along with comparative optical images.