Circular high-Q resonating isotropic strain sensors with large shift of resonance frequency under stress
Date
2009
Authors
Melik, R.
Unal, E.
Perkgoz, N.K.
Puttlitz, C.
Demir, Hilmi Volkan
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Abstract
We present circular architecture bioimplant strain sensors that facilitate a strong resonance frequency shift with mechanical deformation. The clinical application area of these sensors is for in vivo assessment of bone fractures. Using a rectangular geometry, we obtain a resonance shift of 330 MHz for a single device and 170 MHz for its triplet configuration (with three side-by-side resonators on chip) under an applied load of 3,920 N. Using the same device parameters with a circular isotropic architecture, we achieve a resonance frequency shift of 500 MHz for the single device and 260 MHz for its triplet configuration, demonstrating substantially increased sensitivity. © 2009 by the authors.
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Sensors
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Keywords
Biomems sensors, Circular architecture, Frequency shift, Q-factor, Resonators, RFIC, Sensitivity, Bio-mems sensor, Frequency shift, Q-factors, RFIC, Sensitivity, Frequency shift keying, Natural frequencies, Resonators, Sensors
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Language
English
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Article