Rapid thermal annealing of graphene-metal contact

Date
2012
Authors
Balci, O.
Kocabas, C.
Advisor
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
Applied Physics Letters
Print ISSN
0003-6951
Electronic ISSN
Publisher
A I P Publishing LLC
Volume
101
Issue
24
Pages
243105-1 - 243105-5
Language
English
Type
Article
Journal Title
Journal ISSN
Volume Title
Series
Abstract

High quality graphene-metal contacts are desirable for high-performance graphene based electronics. Process related factors result large variation in the contact resistance. A post-processing method is needed to improve graphene-metal contacts. In this letter, we studied rapid thermal annealing (RTA) of graphene-metal contacts. We present results of a systematic investigation of device scaling before and after RTA for various metals. The results reveal that RTA provides a convenient technique to reduce contact resistance, thus to obtain reproducible device operation. © 2012 American Institute of Physics.

Course
Other identifiers
Book Title
Keywords
Citation
Published Version (Please cite this version)